CMOS Hotplate Chemical Microsensors
Springer Berlin (Verlag)
978-3-540-69561-5 (ISBN)
This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics.
The book provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field.
Markus Graf, Degree in Physics, 1992 - 1999 University of Konstanz, Germany, Exchange year at the University Joseph-Fourier, Grenoble, France; Research Assistant: 1999 Microelectronic Center MIC, Lyngby, Denmark; PhD:1999-2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland; Postdoc: since Feb. 2004, Laureate of the Swiss Technology Award 2004 (together with Diego Barrettino, Stefano Taschini and Andreas Hierlemann) for the subjects covered by the book. Research interest: Integrated chemical sensors and CMOS-compatible micromachining,
Diego Barrettino, Dipl.-Ing. degree in electrical engineering, University of Buenos Aires, Argentina; Professional experience: 1997 - 2000 Analog IC designer at Allegro Microsystems Argentina; PhD: 2000 - 2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland; Postdoc: since April 2004, Department of Electrical Engineering, University of Washington, Seattle, WA, USA, Laureate of the Swiss Technology Award 2004 (together with Markus Graf, Stefano Taschini and Andreas Hierlemann). Research interest: analog and digital IC design and the application of control theory in the design of microsystems and MEMS-based microsensors.
Miniaturized Metal-Oxide Sensors.- Thermal Modelling of CMOS Microhotplates.- Microhotplates in CMOS Technology.- Monolithic Gas Sensor Systems.- Microsensor Arrays.- Conclusion and Outlook.
| Erscheint lt. Verlag | 3.4.2007 |
|---|---|
| Reihe/Serie | Microtechnology and MEMS |
| Zusatzinfo | XII, 125 p. |
| Verlagsort | Berlin |
| Sprache | englisch |
| Maße | 155 x 235 mm |
| Gewicht | 365 g |
| Themenwelt | Naturwissenschaften ► Chemie ► Physikalische Chemie |
| Technik ► Elektrotechnik / Energietechnik | |
| Technik ► Maschinenbau | |
| Schlagworte | Chemical sensor • CMOS • CMOS-Schaltungen • Complexity • Control architectures • Design • Integrated systems • Microsensors • Mikrosensoren • Sensor • Simulation |
| ISBN-10 | 3-540-69561-3 / 3540695613 |
| ISBN-13 | 978-3-540-69561-5 / 9783540695615 |
| Zustand | Neuware |
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