![Für diesen Artikel ist leider kein Bild verfügbar.](/img/platzhalter480px.png)
A User's Guide to Ellipsometry
Seiten
1993
Academic Press Inc (Verlag)
978-0-12-693950-7 (ISBN)
Academic Press Inc (Verlag)
978-0-12-693950-7 (ISBN)
- Titel ist leider vergriffen;
keine Neuauflage - Artikel merken
Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement of film thickness and optical constants in films.
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
Theoretical Aspects. Instrumentation. Using Optical Parameters to Determine Material Properties. Determining Optical Parameters for Inaccessible Substrates and Unknown Films. Extremely Thin Films. The Special Case of Polysilicon. The Effect of Roughness. Case Studies. Chapter References. Appendices. Index.
Erscheint lt. Verlag | 11.1.1993 |
---|---|
Verlagsort | San Diego |
Sprache | englisch |
Maße | 151 x 229 mm |
Gewicht | 480 g |
Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik |
Naturwissenschaften ► Physik / Astronomie ► Optik | |
Technik ► Maschinenbau | |
ISBN-10 | 0-12-693950-0 / 0126939500 |
ISBN-13 | 978-0-12-693950-7 / 9780126939507 |
Zustand | Neuware |
Haben Sie eine Frage zum Produkt? |
Mehr entdecken
aus dem Bereich
aus dem Bereich
Aufgaben und Lösungen
Buch | Softcover (2023)
De Gruyter Oldenbourg (Verlag)
39,95 €