Plasma Polymerization Processes

1. Introduction. Historical background. Plasma polymerization and related processes of polymer film formation. 2. Fundamentals of Plasma Physics. Electrical breakdown in a gas and the d.c. glow discharge. Characterization of low temperature plasma generated by a glow discharge. Radio frequency and microwave discharges. 3. Fundamentals of Plasma Chemistry. Reactions in a plasma volume. Reactions on adjacent surfaces. 4. Fundamentals of Plasma Polymerization. Basic deposition arrangements for plasma polymerization. Kinetic models of plasma polymerization. General description of plasma polymer films. 5. Applied Systems for Plasma Polymerization and Classification of Plasma Polymers. Applied plasma polymerization systems. Main groups of plasma polymers. Hard polymer and hard carbon films. Metal-containing organic films. 6. Properties and Application of Plasma-Polymerized Films. Protective coatings. Optical, electrical and magnetic properties. Permselective membranes. Biomedical applications. Modifications of conventional polymer materials by plasma treatment. 7. Potential Applications in Microelectronics. Passivation and protective coatings. Active elements in electronics. Plasma polymerized photoconductive films. Concluding note. References. Appendix. Index.