Mechanic and Dielectric Properties

Contributors
Preface
Deposition and Mechanical Properties of Superlattice Thin Films
I. Introduction
II. Deposition Techniques
III. Characterization
A. X-Ray Diffraction
B. Transmission Electron Microscopy
C. Other Techniques
IV. Deposition Mechanisms, Structure, and Stability
A. Crystal Structure and Lattice Relaxation
B. Nucleation and Layer Morphology
C. Interdiffusion
D. Summary
V. Mechanical Property Measurements
A. Elastic Moduli and Constants
B. Hardness and Yield Strength
VI. Elastic Properties
A. Experimental Results
B. Theoretical Predictions
VII. Mechanical Strength and Hardness
A. Experimental Results
B. Theoretical Predictions
C. Comparison of Experiment and Theory
VIII. Conclusions
Acknowledgments
References
Hard Coatings Prepared by Sputtering and Arc Evaporation
I. Introduction
II. Deposition Techniques Based on Sputtering and Evaporation
A. Effect of Particle Bombardment in Film Deposition Process
B. Sputtering
C. Evaporation
D. Comparison of Reactive Magnetron Sputtering and Arc Evaporation Techniques
III. Hard Coatings
A. Physical Properties of Hard Materials
B. Substrate/Coating Interface
C. Bulk of the Coating Material
D. Upper Layer of the Coating
E. Multilayer and Gradient Coatings
IV. Growth and Properties of Hard Coatings
A. Chemical Composition
B. Phase Composition
C. Structure Zone Models
D. Microstructure of TiN Films Grown under Ion Bombardment
E. Crystalline Structure and Stress
F. Preferred Orientation
G. Surface Morphology
H. Correlation Process/Microstructure/Properties
V. Deposition Process
A. Substrate Heating
B. Surface Etching and Interface Formation
C. Film Deposition
D. Coating Uniformity
VI. Concluding Remarks
References
Thin Films in Microwave Acoustics
I. Introduction
II. Thin Film Materials — Growth and Characterization
A. General Requirements
B. Piezoelectric and Ferroelectric Films
C. Other Film Materials
III. Surface Wave Device Structures
A. Basic Device Principles and Technology Survey
B. SAW Attenuation in Thin Ferromagnetic Films
C. Integrated Device Structures
D. SAW-ACT
IV. Bulk Wave Device Structures
A. General Background
B. Delay Lines
C. High-Overtone Bulk Acoustic Resonators (HBAR)
D. Film Bulk-Wave Acoustic Resonator (FBAR)
V. Emerging Technology
A. Thin-Film Materials Issues
B. Acoustic Sensors
C. Other Emerging Applications
VI. Conclusions
References
Ferroelectric Films for Integrated Electronics
I. Introduction and Background
II. Ferroelectric Film Materials
A. Properties and Applications of Interest
B. Film Deposition—General
III. Growth and Applications—Examples
A. PbTiO3 and Solid Solutions
B. LiNbO3, LiTaO3, KNbO3, and KTaO3
C. Bismuth Titanate, Bi4Ti3O12
D. Polymers and Inorganic Fluorides
E. Other Materials
IV. Integrated Electronics Issues
A. Materials Processing
B. Interface and Stability Effects
C. Integrated Device Structures
V. Conclusions
Acknowledgments
References
Electrochromic Tungsten-Oxide-Based Thin Films: Physics, Chemistry, and Technology
I. Introduction
II. Comments on W Oxide Bulk Crystals
III. As-deposited Films: Structure and Composition
A. Evaporated Films
B. Sputter-deposited Films
C. Films Made by Chemical and Electrochemical Techniques
IV. Ion Intercalated Films: Electrochemical Characterization
A. Diffusion Constants
B. Electromotive Force
C. Chronoamperometry
D. Cyclic Voltammetry
E. Impedance Spectrometry
F. Beam Deflectometry
V. Ion Intercalated Films: Physical Characterization
A. Microbalance Studies
B. Depth Profiling of Intercalated Species
C. Electron- and X-ray Extinction
D. Vibrational Spectroscopy
E. Magnetic Resonance
F. X-ray Photoelectron Spectroscopy
VI. Optical Properties
A. Semiconductor Bandgaps
B. As-deposited Films: Luminous and Near-infrared Properties
C. Survey of Coloration Methods
D. Ion Intercalated Films: Luminous and Near-infrared Properties
E. Theoretical Models
VII. Device Data
A. Liquid Electrolyte
B. Solid Inorganic Bulk-type Ion Conductor
C. Solid Inorganic Thin Film Ion Conductor
D. Polymer Electrolyte
VIII. Summary and Conclusions
References
Author Index
Subject Index