Microscopy of Semiconducting Materials 1997 -

Microscopy of Semiconducting Materials 1997

Proceedings of the Royal Microscopical Society Conference held at Oxford University, 7-10 April 1997

A.G Cullis, J.L Hutchinson (Herausgeber)

Buch | Hardcover
326 Seiten
1997
Institute of Physics Publishing (Verlag)
978-0-7503-0464-1 (ISBN)
329,95 inkl. MwSt
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This tenth volume in the series provides an overview of recent developments and current research activity including both invited review and summary research papers. Particular importance is attached to papers addressing the centenary of the discovery of the electron.
This tenth volume in the series provides an overview of recent developments and current research activity including both invited review and summary research papers. Particular importance is attached at this meeting to papers addressing the centenary of the discovery of the electron. "MSM" has become the premier forum for dissemination of research results in this well established field, which is of continuing importance for the analysis of both reliable substrate materials, and as-grown devices in the whole range of semiconducting materials. It covers developments in analysis techniques across the whole range of microscopies. Also includes specimen preparation techniques.

Preface. Electron centenary symposium (W F Brinkman: The materials basis behind the telecommunications revolution. T Matsuo: The evolution of electron beam lithography and metrology for semiconductor technologies.) High resolution microscopy and nanoscale analysis (11 papers). Dislocations and boundaries (6 papers). Epitaxial layers: defect behaviour and strain relief (12 papers). Epitaxial layers: wide band-gap nitrides (14 papers). Epitaxial layers: general growth phenomena (19 papers). Self-organised and quantum domain structures (14 papers). Processed silicon, diamond and specimen preparation methods (21 papers). Silicides and contacts (7 papers). Bulk compounds (4 papers). Electronic devices (13 papers). Scanning probe microscopy (6 papers). Advanced scanning electron and optical microscopy (16 papers). Author and subject indexes.

Erscheint lt. Verlag 1.1.1997
Reihe/Serie Institute of Physics Conference Series ; 157
Verlagsort London
Sprache englisch
Maße 156 x 235 mm
Themenwelt Naturwissenschaften Physik / Astronomie Elektrodynamik
Naturwissenschaften Physik / Astronomie Festkörperphysik
ISBN-10 0-7503-0464-2 / 0750304642
ISBN-13 978-0-7503-0464-1 / 9780750304641
Zustand Neuware
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