Photonic Waveguide Components on Silicon Substrate (eBook)

Preface 7
Contents 8
About the Authors 10
Abbreviations 11
Symbols 13
1 Introduction to Waveguides 16
1.1 Fundamentals and Background 16
1.1.1 Rib and Wire Waveguides 18
1.1.2 Micro-ring Resonator 19
1.1.3 Photonic Crystal Structure 20
1.1.4 Power Splitter 21
1.2 Motivation and Objectives 22
1.3 Outline of the Book 23
References 23
2 Theoretical Studies on Silicon and SU-8 Waveguides 27
2.1 Introduction 27
2.2 Design of Single-Mode Wire Waveguide 27
2.3 Bending Loss Computation of Bent Wire 34
2.4 Lateral Mode Profile Computation of Photonic Wire 35
2.5 Design Aspects of Wire Waveguide with Slanted Wall 35
2.6 Design of Large Cross-Section Silicon Rib Waveguide 36
2.7 Computed Results 37
2.8 Conclusions 45
References 46
3 Experimental Studies on SU-8 Wire Waveguides 47
3.1 Introduction 47
3.2 Fabrication and Characterization 48
3.2.1 Fabrication by Laser Direct Writing Technique 48
3.2.2 Characterization 49
3.2.3 Fabrication by Focused Ion Beam Lithography 59
3.2.4 Characterization 61
3.3 Conclusions 63
References 64
4 Design and Development of Some SU-8 Wire Waveguide Structures 66
4.1 Introduction 66
4.2 Optical Directional Couplers 67
4.2.1 Design 67
4.2.2 Computed Results 69
4.2.3 Fabrication 71
4.2.4 Characterization 73
4.3 Micro-ring Resonator 76
4.3.1 Design 77
4.3.2 Computed Results 78
4.3.3 Fabrication 80
4.3.4 Characterization 80
4.3.5 Discussions 84
4.4 Photonic Crystal Structure on Waveguide 85
4.4.1 Design and Simulation 86
4.4.2 Fabrication 86
4.4.3 Characterization 88
4.4.4 Discussions 89
4.5 Conclusions 90
References 90
5 Design and Development of Polarization-Independent Power Splitter Using Coupled Silicon Waveguides 93
5.1 Introduction 93
5.2 Power Splitter Using Coupled Silicon Wire Waveguides 93
5.2.1 Design and Analysis 93
5.2.2 Computed Results 95
5.2.3 Discussions 98
5.3 Power Splitter Using Coupled Silicon Rib Waveguides 98
5.3.1 Design and Analysis 98
5.3.2 Computed Results 100
5.3.3 Fabrication 102
5.3.4 Characterization 104
5.4 Conclusions 107
References 108
6 Conclusions and Future Scope of Work 109
6.1 Summary 109
6.2 Contributions and Achievements 109
6.3 Limitations of the Present Work and Scopes of Future Research 111
References 112