Etching in Microsystem Technology

Michael Koehler is Professor of Physical Chemistry and Micro-reaction Technology at the Technical University of Ilmenau, Germany, since 2001 and at the same time Visiting Scientist at the Institute for Physical High Technology in Jena, also Germany. His research work concerns chip-based reaction technology, with interests focusing around molecular nanotechnology such as biotechnical microprocesses and DNA nanoparticle adducts. He studied chemistry in Halle an der Saale and Jena, obtaining his diploma in 1981. After completing his Ph.D. on electrochemical effects in microlithography, he worked from 1986 to 1990 as project leader at the Institute of Physical Technology of the Academy of Sciences of the GDR, researching into submicrometre lithography. After the reunification of Germany, he visited the Max Planck Institute of Nutritional Physiology in Dortmund. In 1991, he returned to Jena to join the IPHT as group leader for microstructuring, taking over the department for microsystem technology in 1994. Parallel to these appointments, in 1992 he completed his habilitation in general and physical chemistry, giving lectures as Wuppertal University and serving from 1993 on as lecturer at the Friedrich-Schiller Universite in Jena for microlithography, microsystem technology and nanotechnology.