Silicon Optoelectronic Integrated Circuits (eBook)

Prof. Dr. Horst Zimmermann received the diploma in Physics in 1984 from the University of Bayreuth, Germany, and the Dr.-Ing. degree from the University Erlangen-Nürnberg working at the Fraunhofer Institute for Integrated Circuits (IIS-B), Erlangen, Germany in 1991. Then, Dr. Zimmermann was an Alexander-von-Humboldt Research-Fellow at Duke University, Durham, N.C., working on diffusion in Si, GaAs, and InP until 1992. In 1993, he joined the Chair for Semiconductor Electronics at Kiel University, Kiel, Germany, where he lectured optoelectronics and worked on optoelectronic integration in silicon technology. Since 2000 he is full professor for Electronic Circuit Engineering at Technische Universität Wien, Vienna, Austria. His main interests are in design and characterization of analog and nanometer CMOS circuits as well as optoelectronic integrated CMOS and BiCMOS circuits. He is author of the Springer books 'Integrated Silicon Optoelectronics' and 'Silicon Optoelectronic Integrated Circuits' (1st edition) as well as coauthor of “Highly Sensitive Optical Receivers”, “Optical Communication over Plastic Optical Fibers”, “Analog Filters in Nanometer CMOS”, “Comparators in Nanometer CMOS Technology”, and “Optoelectronic Circuits in Nanometer CMOS Technology”. In addition he is author and co-author of more than 500 publications. In 2002 he became Senior Member IEEE. He was primary guest editor of the Nov./Dec. 2014 issue of IEEE J. Selected Topics in Quantum Electronics on Optical Detectors: Technology and Applications

Preface to the Second Edition 6
Preface to the First Edition 8
Contents 11
About the Author 14
Symbols 15
1 Basics and Theory 20
1.1 Basics of Optical Absorption 20
1.1.1 Photons and Their Properties 20
1.1.2 Optical Absorption of Important Semiconductor Materials 22
1.1.3 Photogeneration 24
1.2 Semiconductor Equations 25
1.3 Important Models for Photodetectors 27
1.3.1 Carrier Drift 28
1.3.2 Carrier Diffusion 32
1.3.3 Quantum Efficiency and Responsivity 35
1.3.4 Equivalent Circuit of a Photodiode 40
References 43
2 Integrated Silicon Photodetectors 44
2.1 Integrated Detectors in Bipolar Technology 44
2.1.1 Bipolar Processes 44
2.1.2 Integrated Detectors in Standard Bipolar Technology 47
2.1.3 Integrated Detectors in Modified Bipolar Technology 50
2.2 CMOS-Integrated Photodetectors 53
2.2.1 One-Well CMOS Processes 53
2.2.2 Twin-Well CMOS Processes 54
2.2.3 Triple-Well CMOS Processes 55
2.2.4 Integrated Detectors in Standard CMOS Processes 56
2.2.5 Spatially-Modulated-Light Detector 61
2.2.6 PIN Photodiode 62
2.2.7 Charge-Coupled-Device Image Sensors 77
2.2.8 Active-Pixel Sensors 81
2.2.9 Amorphous-Silicon Detectors 86
2.2.10 CMOS-Integrated Bipolar Phototransistors 88
2.2.11 Photonic Mixer Device 91
2.2.12 Avalanche Photodiodes 92
2.2.13 Single-Photon Avalanche Diodes 95
2.3 BiCMOS-Integrated Detectors 97
2.3.1 BiCMOS Processes 97
2.3.2 BiCMOS-Integrated Photodiodes 104
References 113
3 Detectors in Thin Crystalline Silicon Films 124
3.1 Photodiodes in Silicon-on-Insulator 124
3.2 Silicon on Sapphire 129
3.3 Polyimide Bonding 130
References 131
4 SiGe Photodetectors 133
4.1 Heteroepitaxial Growth 133
4.2 Absorption Coefficient of SiGe Alloys 134
4.3 SiGe/Si PIN Hetero-Bipolar-Transistor Integration 135
References 137
5 Design of Integrated Optical Receiver Circuits 139
5.1 Circuit Simulators and Transistor Models 139
5.2 Layout and Verification Tools 144
5.3 Design of OEICs 145
5.4 Transimpedance Amplifier 148
5.4.1 Frequency Response 149
5.4.2 Phase and Group Delay 152
5.4.3 Stability and Compensation 155
5.4.4 Bandwidth of Transistor Transimpedance Amplifier Circuit 155
5.4.5 Bandwidth Limit of Integrated Transimpedance Amplifiers 159
5.4.6 New ?-Model for Integrated Transimpedance Amplifier 160
5.4.7 Shunt-Shunt Feedback 169
5.4.8 Input and Output Resistance 173
5.4.9 Noise and Sensitivity 175
5.4.10 Poisson Statistics and Quantum Limit 183
References 184
6 Examples of Optoelectronic Integrated Circuits 186
6.1 Digital CMOS Circuits 187
6.1.1 Synchronous Circuits 187
6.1.2 Asynchronous Circuits 192
6.2 Digital BiCMOS Circuits 194
6.3 Laser Driver Circuits 195
6.4 Analog Circuits 198
6.4.1 Bipolar Circuits 198
6.4.2 Two-Dimensional CMOS Imagers 201
6.4.3 Optical Distance Measurement Circuits 211
6.4.4 3D Sensors with Photodiodes in Standard CMOS 215
6.4.5 3D Sensors with PIN Photodiodes 217
6.4.6 3D Sensors with SPADs 221
6.4.7 Smart Pixel Sensors 223
6.4.8 CMOS Optical Sensors 236
6.4.9 BiCMOS Optical Sensors 251
6.4.10 Sensors Using Single-Photon Detection 254
6.4.11 CMOS Circuits for Optical Storage Systems 255
6.4.12 BiCMOS Circuits for Optical Storage Systems 265
6.4.13 Continuous-Mode Fiber Receivers 285
6.4.14 Receiver for Wireless Infrared Communication 329
6.4.15 OWC Receivers and Experiments with Visible Light 337
6.4.16 Hybrid Receivers 350
6.4.17 Speed Enhancement Techniques 352
6.4.18 Plastic-Optical-Fiber Receivers 365
6.4.19 Burst-Mode Optical Receivers 379
6.4.20 Deep-Sub-m Receivers 383
6.4.21 Receivers Aiming Towards the Quantum Limit 386
6.4.22 Comparison of Fiber Receivers 401
6.4.23 Special Circuits 406
6.5 Summary 410
References 411
7 Circuits for Electronic-Photonic Integration 423
7.1 3D-Integration Technologies 423
7.1.1 Copper Pillar Connection 423
7.1.2 Through Oxide Vias 424
7.1.3 Through Silicon Vias 425
7.2 Optical Switch 425
7.3 Optical Transceiver 436
7.4 Sensor for Optical Tomography 442
7.5 Sensor for 3D Microimaging 445
References 446
Index 450