Handbook of Inorganic and Organometallic Chemistry / Si. Silicium. Silicon. (System-Nr. 15) / Supplement Volume / Silicon Nitride in Microelectronics and Solar Cells

This is the first of three volumes that will cover silicon nitride having the idealized formula Si3N4. The current volume is devoted to the application of silicon nitride to microelectronic device fabrication and use. Related fields, specifically solar cell research and fabrication, are covered in a separate section. The major portion for this volume covers applications of silicon nitride in standard and advanced microelectron ics. The latter includes superlattices, high-temperature superconductors, and sensors in physics, chemistry, and medicine, areas which are all expected to be of considerable importance in the near future. The reported information has been extracted from 4000 critically selected publications out of a total of 6000 scientific papers and patents, including 200 Japanese patent applications. A list of relevant abbreviations and acronyms and an extensive subject index conclude this volume.