Nanofabrication
Springer International Publishing (Verlag)
978-3-319-39359-9 (ISBN)
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Zheng Cui, PhD, is a professor at and Director of the Department of Printed Electronics at the Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences. He received his PhD from Southeast University in Nanjing, China, and has been a Visiting Fellow at the Microelectronics Research Center at Cambridge University, as well as a Senior Scientist and Principal Scientist at Central Microstructure Facility in Rutherford Appleton Laboratory.
1. Introduction.- 2. Nanofabrication by Photons.- 3. Nanofabrication by Electron Beam.- 4. Nanofabrication by Ion Beam.- 5. Nanofabrication by Scanning Probes.- 6. Nanofabrication by Replication.- 7. Nanoscale Pattern Transfer by Etching.- 8. Nanoscale Pattern Transfer by Deposition.- 9. Indirect Nanofabrication.- 10. Nanofabrication by Self-Assembly.- 11. Applications of Nanofabrication Technologies.
| Erscheinungsdatum | 13.09.2016 |
|---|---|
| Zusatzinfo | XVII, 432 p. 316 illus., 50 illus. in color. |
| Verlagsort | Cham |
| Sprache | englisch |
| Maße | 155 x 235 mm |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Elektrodynamik |
| Technik ► Elektrotechnik / Energietechnik | |
| Technik ► Maschinenbau | |
| Schlagworte | Additive nanomanufacturing • Circuits and Systems • Continuum Mechanics and Mechanics of Materials • Electron Beam Lithography • Engineering • Nanofabrication • nanoimprinting • nanoscale pattern transfer • Nanostructure by self-assembly • Nanotechnologie • Nanotechnology and Microengineering • Optics and Electrodynamics • Scanning probe nanofabrication |
| ISBN-10 | 3-319-39359-6 / 3319393596 |
| ISBN-13 | 978-3-319-39359-9 / 9783319393599 |
| Zustand | Neuware |
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