Temperature Measurement during Millisecond Annealing (eBook)

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.

Preface 7
Acknowledgement 8
Abstract 9
Table of Contents 11
List of Figures 13
List of Tables 18
List of Abbreviations, Acronyms and Special Terms 19
1 Introduction and Motivation 22
2 Fundamentals of Flash Lamp Annealing of Shallow Boron-Doped Silicon 26
2.1 Electrical and Optical Characteristics of Flash Lamps 26
2.2 Absorption of Light in Single-Crystal Silicon during Flash Lamp Annealing 29
2.3 Defect Annealing and Dopant Activation in Boron-Doped Silicon 37
2.3.1 Types of Defects in Single-Crystal Silicon 37
2.3.2 Point Defects in Silicon and Defect Migration during Thermal Treatment 40
2.3.3 Enhanced Diffusion in Shallow Boron-Doped Silicon 44
2.4 Comparison of Flash Lamp Annealing with Furnace, Rapid Thermal and Laser Annealing 45
3 Fundamentals of Surface Temperature Measurements during Flash Lamp Annealing 48
3.1 Planck’s Law of Thermal Radiation – a Historical Outline [44] 48
3.2 Fundamentals of Thermal Radiation and Surface Temperature Measurements 50
3.3 Radiation Thermometry – Pyrometry [59] 55
3.3.1 Pyrometer Formats 55
3.3.2 Limitations of Pyrometry for Flash Lamp Annealing 56
4 Concept of Ripple Pyrometry during Flash Lamp Annealing 59
4.1 Review on Temperature Measurement for Flash Lamp Annealing 59
4.1.1 X-ray diffraction 59
4.1.2 Interference 60
4.1.3 Recrystallisation 61
4.1.4 Ellipsometry 63
4.1.5 Polaradiometry 64
4.2 State of the Art [3] 65
5 Ripple Pyrometry for Flash Lamp Annealing 70
5.1 Idea and Set-up 70
5.1.1 Intrinsic Ripple 71
5.1.2 Quartz Oscillator 72
5.1.3 Mechanical Oscillator 75
5.2 Methods 77
5.2.1 Temperature Simulation 77
5.2.2 Secondary Ion Mass Spectrometry [76] 78
5.2.3 Reflectometry 80
5.2.4 Raytracing 81
5.3 Technical Realisation 82
5.4 Amplitude Modulation of Flash Pulses 85
5.5 Analysis of Amplitude Modulation during Flash Lamp Annealing 89
5.6 Reflectivity Measurement during Flash Lamp Annealing 95
6 Experiments – Ripple Pyrometry during Flash Lamp Annealing 103
6.1 Proof of Concept 103
6.2 Low Temperature Measurement by Ripple Pyrometry 107
6.3 High Temperature Measurement by Ripple Pyrometry 113
6.3.1 Ripple Pyrometry on Shallow Boron-Doped Silicon 113
6.3.2 Temperature Control – Secondary Ion Mass Spectrometry 117
7 Closing Discussion and Outlook 120
Bibliography 123