Handbook of Optical Systems – V5 – Metrology of Optical Components and Systems

Herbert Gross studied physics at the University of Stuttgart, Germany, and joined Carl Zeiss in 1982, where has since been working in the department of optical design. His special areas of interest are the development of simulation methods, optical design software and algorithms, the modeling of laser systems and simulation of problems in physical optics, and the tolerance and the measurement of optical systems. Since 1995, he has been head of the central optical design department at Zeiss. In 1995, he received his PhD at the University of Stuttgart, Germany, on the modeling of laser beam propagation in the partial coherent region.

Preface XIX Introduction XXI 46 Interferometry 1 46.1 Introduction 3 46.2 Basic Principles of Interference 4 46.3 Interferometers 44 46.4 Interferometer Designs 81 46.5 Detection Techniques and Algorithms 95 46.6 Calibration Techniques 120 46.7 Dynamic Range 140 46.8 Accuracy and Error Sources 148 46.9 Literature 175 47 Non-interferometric Wavefront Sensing 181 47.1 Introduction 183 47.2 Hartmann Shack Sensor 183 47.3 Hartmann Sensor 208 47.4 Phase Space Analyzer 219 47.5 Point Image Filtering Techniques 230 47.6 Other Wavefront Sensor Concepts 239 47.7 Point Spread Function Retrieval 249 47.8 Calculation of Wavefront and Zernike Coefficients 283 47.9 Literature 297 48 Radiometry 303 48.1 Introduction 304 48.2 Basic Principles of Radiometry 305 48.3 Monochromators 341 48.4 Spectrometers 402 48.5 Literature 427 49 Image Analysis 431 49.1 Introduction 432 49.2 Basic Principles of Image Analysis 432 49.3 Star Test, Slit Test 436 49.4 Test Targets, Visual Inspection 450 49.5 Distortion Metrology 452 49.6 Deflectometers 464 49.7 Pattern and Fringe Projectors 471 49.8 Literature 485 50 Distance and Angle Metrology 489 50.1 Introduction 490 50.2 Long-range Displacement Metrology 490 50.3 Short-range Displacement and Thickness Metrology 515 50.4 Angle and Tilt Metrology 524 50.5 Combined Distance and Angle Metrology 540 50.6 Optical Profile Metrology 548 50.7 Literature 555 51 Polarimetry 559 51.1 Introduction 560 51.2 Basic principles of Polarimetry 561 51.3 Polarizing Elements 572 51.4 Polarimeters 597 51.5 Calibration Techniques 633 51.6 Accuracy and Error Sources 635 51.7 Literature 641 52 Testing the Quality of Optical Materials 643 52.1 Specifications 644 52.2 Refractive Index 644 52.3 Transmittance 651 52.4 Inhomogeneity and Striae 655 52.5 Birefringence 664 52.6 Bubbles and Inclusions 673 52.7 Literature 677 53 Testing the Geometry of Optical Components 679 53.1 Specifications 680 53.2 Radius of Curvature 681 53.3 Central Thickness 689 53.4 Surface Form and Figure Irrigularities 694 53.5 Centering 760 53.6 Diameter and Chamfer 776 53.7 Literature 779 54 Testing Texture and Imperfections of Optical Surfaces 785 54.1 Specifications 786 54.2 Surface Texture 786 54.3 Surface Imperfections 823 54.4 Literature 836 55 Testing the Quality of Coatings 839 55.1 Introduction 840 55.2 Specifications 844 55.3 Model Simulation 847 55.4 Coating Metrology 858 55.5 Literature 878 56 System Testing 881 56.1 Introduction 883 56.2 Basic Parameters of Optical Systems 887 56.3 Measurement of Image Quality 912 56.4 Measurement of the Transfer Function 930 56.5 Miscellaneous System Properties 945 56.6 Literature 960 Index 967