Statistical Approaches to the Inverse Problem of Scatterometry
Seiten
2015
Fachverlag NW in Carl Ed. Schünemann KG
978-3-95606-063-2 (ISBN)
Fachverlag NW in Carl Ed. Schünemann KG
978-3-95606-063-2 (ISBN)
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Opt-73: M.-A. Henn:
Statistical Approaches to the Inverse Probelm of Scatterometry
Engl., 92 S., 47 Abb., 13 Tab., ISBN 978-3-95606-063-2, 2013 € 16,50
In the present work statistical approaches to the inverse problem of scatterometry are discussed. Scatterometry is the dimensional characterization of periodic nanostructures as they are used in the manufacturing of lithographic masks. In contrast to direct imaging methods, such as electron microscopy, scatterometry is a non-imaging indirect measurement method. The critical dimensions (CDs) such as line widths and heights of the surface profile are determined from the measured light diffraction pattern.
Statistical Approaches to the Inverse Probelm of Scatterometry
Engl., 92 S., 47 Abb., 13 Tab., ISBN 978-3-95606-063-2, 2013 € 16,50
In the present work statistical approaches to the inverse problem of scatterometry are discussed. Scatterometry is the dimensional characterization of periodic nanostructures as they are used in the manufacturing of lithographic masks. In contrast to direct imaging methods, such as electron microscopy, scatterometry is a non-imaging indirect measurement method. The critical dimensions (CDs) such as line widths and heights of the surface profile are determined from the measured light diffraction pattern.
Reihe/Serie | PTB-Berichte. Optik (Opt) ; 73 |
---|---|
Verlagsort | Bremen |
Sprache | englisch |
Maße | 210 x 297 mm |
Gewicht | 369 g |
Einbandart | Paperback |
Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Optik |
Schlagworte | Optik • PTB • Scatterometry |
ISBN-10 | 3-95606-063-6 / 3956060636 |
ISBN-13 | 978-3-95606-063-2 / 9783956060632 |
Zustand | Neuware |
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