Ion Beams in Materials Processing and Analysis

Klaus Wetzig studied physics at the University of Technology in Dresden, receiving his licence in 1963, his doctorate in 1967 and his habilitation in 1973. In 1975 he moved to the Academy of Sciences, and since 1992 he is Full Professor of Materials Analysis at the University of Technology in Dresden and Director at the Leibniz Institute of Solid State and Materials Research Dresden. His research interests include materials analysis and microstructures, especially electron microscopy of functional materials, characterization of thin films for electronics, and nanostructural features in general.

Preface.- 1. Introduction.- 2. Ion- Solid Interactions.- 2.1 Fundamental Principles.- 2.2 Binary Elastic Collisions.- 2.3 Ion Stopping.- 2.4 Ion Channeling.- 2.5 Ion Induced Target Modifications.- 3. Ion Beam Technology.- 3.1 Principles of Ion Accelerators.- 3.2 Ion Sources.- 3.3 Ion Acceleration.- 3.4 Ion Beam Handling.- 3.5 Ion Implantation Systems.- 3.6 Electrostatic Ion Accelerator Systems.- 3.7 Focused Ion Beam Systems.- 4. Materials Processing.- 4.1 Ion Irradiation Effects in Crystalline Materials.- 4.2 Ion Implantation into Semiconductors.- 4.3 Ion Beam Synthesis of New Phases in Solids.- 4.4 Ion Beam Mixing of Interfaces.- 4.5 Ion Beam Slicing of Thin Layers (Smart-Cut for SOI and Solar Cells).- 4.6 Ion Beam Erosion, Sputtering and Surface Patterning (Ripples and Dots).- 4.7 Ion Beam Shaping of Nanomaterials.- 4.8 Ion Beam Processing of other Materials.- 5. Ion Beam Preparation of Materials.- 5.1 Removal of Target Atoms by Sputtering.- 5.2 Effects on Sputtering Yield.- 5.3 Preparation Steps by Ion Beam Irradiation.- 5.4 Focus Ion Beam (FIB) Preparation.- 6. Ion Beam Analysis by Ion Beams.- 6.1 Introduction.- 6.2 Ion Beam Analytical Techniques - a Survey.- 6.3 Ion Beam Scattering Techniques.- 6.4 Ion Beam Induced Photon Emission.- 6.5 Nuclear Reaction Analysis (NRA).- 6.6 Ion Beam Induced Electron and Light Emission.- 6.7 Secondary Ion Emission.- 6.8 Ion Beam Imaging Techniques.- 7. Special Ion Beam Applications in Materials Analysis Problems.- 7.1 Functional ThinFilms and Layers.- 7.2 Ion Beam Analysis in Art and Archeometry.- 7.3 Special Applications in Life Sciences.- Index.