Applications of Diamond Films and Related Materials (eBook)

Front Cover 1
Applications of Diamond Films and Related Materials 4
Copyright Page 5
Table of Contents 14
FOREWORD 6
PART I: INTRODUCTION 28
Chapter 1. Applications of Bulk and Thin-Film Diamonds 30
Abstract 30
1. BULK DIAMOND 30
2. THIN FILM DIAMOND 31
Chapter 2. Studies and Development of Diamond Films and Related Materials in the USSR 36
Abstract 36
REFERENCES 41
Chapter 3. Diamond CVD researches as patent applied 42
1. Introduction 42
2. Excitation techniques 42
3. Combined use of several excitation methods 44
4. Substrate techniques 45
5. Pre-treatment of the carbide substrate 46
6. Applications 47
7. Quality improvement and evaluation 48
8. References 49
Chapter 4. A Chemical Perspective on the Nucleation and Growth of Diamond from Hydrocarbons 52
Abstract 52
1. Nucleation 52
2. Morphological Development and Growth Mechanisms 56
3. Summary 60
References 60
PART II: DIAMOND CUTTING TOOLS 62
Chapter 5. Tool Application of Diamond and CBN 64
Abstract 64
1. Introduction 64
2. Tool application of diamond 65
3. Tool application of CBN 67
4. Conclusion 68
Chapter 6. Properties and Performance of Diamond Coated Ceramic Cutting Tools 70
Abstract 70
1. DIAMOND AS A CUTTING TOOL MATERIAL 70
2. APPLICATIONS FOR CVD DIAMOND IN MACHINING 71
3. POTENTIAL SUBSTRATE MATERIALS FOR THIN FILM DIAMOND TOOLS 72
4. EXPERIMENTAL 73
5. RESULTS 74
6. SUMMARIZING REMARKS 78
7. REFERENCES 78
Chapter 7. CUTTING TOOL PERFORMANCE OF CVD THICK FILM DIAMOND 80
ABSTRACT 80
1. INTRODUCTION 80
2. EXPERIMENTAL PROCEDURE 80
3. RESULTS 82
4. CONCLUSIONS 86
5. REFERENCES 86
Chapter 8. Diamond Coated Inserts : Characteristics and Performance 88
Abstract 88
1. Introduction 88
2. Diamonds as cutting tool materials 88
3. Merits of diamond coated inserts 89
4. Characteristics and performance of CVD diamond coated inserts DC46 90
5. Results of machining factory's tests 93
6. Future scope 95
7. Conclusions 95
8. References 95
Chapter 9. The tool life of diamond coatings in milling an Al-Si alloy 96
Abstract 96
1. INTRODUCTION 96
2. EXPERIMENTAL DETAILS 97
3. RESULTS AND DISCUSSION 97
4.CONCLUSION 103
5. REFERENCES 103
Chapter 10. Diamond Coated Cutting Tools Synthesized from CO 104
Abstract 104
1. Introduction 104
2. Manufacture of Diamond-Coated Tools 105
3. Cutting properties of Diamond-Coated Tools[5] 107
4. Conclusion 110
5. References 110
Chatper 11. Characterization of CVD Diamond Grinding Powder 112
Abstract 112
1. Introduction 112
2. Experimental method 113
3. Grinding experiment of the ceramicmaterials 114
4. Discussionson the fractur of the CVD diamond powder 118
5. Conclusions 119
References 119
Chapter 12. Determination of Thickness in Diamond Film Used for Brazed Cutting Inserts 120
Abstract 120
1. INTRODUCTION 120
2. EXPERIMENTAL 121
3. RESULTS AND DISCUSSION 122
4. CONCLUSIONS 125
ACKNOWLEDGMENTS 125
REFERENCES 125
Chapter 13. Effect of Wear Flat Configurations on the Temperature Distribution in Polycrystalline Diamond Compact Cutters during Orthogonal Rock Cutting 126
Abstract 126
1. INTRODUCTION 126
2. THE HEAT TRANSFER MODEL 126
3. WEAR FLAT STUDIES 128
4. CONCLUSIONS 131
5. ACKNOWLEDGEMENT 131
6. NOMENCLATURE 131
7. REFERENCES 131
Chapter 14. "Industrial Application and Quality Control of Crystalline Diamond Coated Tools" 132
1. The Composite System "Diamond coated Carbide Tools" and its typical applications 132
2. Industrial coating process for Carbide Tools with complex geometries 133
3. Quality control of diamond coatings 134
4. Tool life of small diamond coated Carbide Drills in carbide green compacts 135
5. Conclusions 137
6. List of references 137
PART III: MECHANICAL PROPERTIES AND APPLICATIONS OF DIAMOND 138
Chapter 15. Mechanical properties of diamond and diamond-like films 140
Abstract 140
1. INTRODUCTION 140
2. SEPARATION OF ELASTIC A N D PLASTIC EFFECTS 142
3. INDENTATION TESTING OF THIN FILMS OR COATINGS 143
4. INDENTATION SIZE EFFECT 143
5. PROPERTIES OF HARDCARBON (HCC) OR DIAMOND-LIKE (DLC) FILMS 144
6. PROPERTIES OF DIAMOND FILMS 145
7. SUMMARY 146
8. ACNOWLEDGEMENTS 147
9. REFERENCES 147
Chapter 16. In-situ Measuring of Stress Development in Diamond Thin Films 148
Abstract 148
1. INTRODUCTION 148
2. EXPERIMENTAL 149
3. RESULTS AND DISCUSSION 149
4. CONCLUSIONS 155
5. ACKNOWLEDGEMENTS 155
6. REFERENCES 155
Chapter 17. The Preparation of Diamond-Coated a-SiC Pins for Standardized SEM Tribometrv of Diamond-Coated Substrates 156
ABSTRACT 156
1. INTRODUCTION 156
2. EXPERIMENTAL 157
3. REFERENCES 159
Chapter 18. An investigation of diamond growth on ferrous metals 164
Abstract 164
1. INTRODUCTION 164
2. EXPERIMENT 165
3. RESULTS AND DISCUSSION 166
4. SUMMARY 168
5. ACKNOWLEDGEMENTS 168
6. REFERENCES 168
Chapter 19. Adhesion of metallic films to diamondand cBN in the region of its thermodynamic stability 170
Abstract 170
1. INTRODUCTION 170
2. EXPERIMENTAL METHODS 170
3. EXPERIMENTAL RESULTS 172
4. DISCUSSION 174
Chapter 20. Residual stress in CVD diamond films 176
Abstract 176
INTRODUCTION 176
EXPERIMENTAL 176
RESULTS AND DISCUSSION 177
CONCLUSIONS 181
ACKNOWLEDGMENTS 181
REFERENCES 181
PART IV: DIAMOND OPTICS 182
Chapter 21. Polycrystalline diamond for infrared optical applications prepared by the microwave plasma and hot filament chemical vapor deposition techniques 184
Abstract 184
1. INTRODUCTION 184
2. IR ABSORPTION IN HIGH PRESSURE DIAMOND 185
3. IR ABSORPTION IN DIAMOND DEPOSITS 186
4. SUMMARY 189
5. REFERENCES 189
Chapter 22. CVD DIAMOND COATINGS FOR THE INFRARED BY OPTICAL BRAZING 190
ABSTRACT 190
I INTRODUCTION 190
II DIAMOND DEPOSITION 191
III OPTICAL BRAZING 191
IV CHARACTERISTICS OF BONDED WINDOWS 192
V CONCLUSIONS AND DISCUSSION 194
ACKNOWLEDGMENTS 194
REFERENCES 195
Chapter 23. High Density Amorphous Carbon Films and the Preparation of Diamond Membranes for X-Ray Lithography 196
ABSTRACT 196
INTRODUCTION 197
DISCUSSION 198
REFERENCES AND NOTES 204
Chapter 24. Critical Assessment of Optical Properties of CVD Diamond Films 208
Abstract 208
1. INTRODUCTION 208
2. FUNDAMENTAL OPTICAL PROPERTIES OF DIAMOND 208
3. OPTICAL TRANSMISSION OF CVD DIAMOND 211
4. OPTICAL EMISSION 212
5. X-RAY WINDOW 213
6. CONCLUSIONS 214
7. ACKNOWLEDGEMENT 214
8. REFERENCES 214
Chapter 25. High Quality Flame Deposited Diamond Films for Infrared Optical Windows 216
Abstract 216
1. INTRODUCTION 216
2. EXPERIMENTAL 217
3. RESULTS AND DISCUSSION 218
4. CONCLUSIONS 219
5. ACKNOWLEDGMENT 219
6. REFERENCES 219
Chapter 26. Polycrystalline diamond films for optical applications 224
Abstract 224
1. Introduction 224
2. Experimental 225
3. Results and discussion 226
4. Conclusions 232
5. Acknowledgment 232
6. References 232
Chapter 27. Transparent Diamond Film Deposited by Optimized DC Arc Plasma Jet 234
Abstract 234
1. INTRODUCTION 234
2. EXPERIMENTAL 234
3. RESULTS AND DISCUSSION 235
4. CONCLUSION 238
5. ACKNOWLEDGEMENTS 239
6. REFERENCES 239
Chapter 28. Preparation and Characterization of Optically High Quality Diamond Film 240
1. Introduction 240
2. Experiment 241
3. Discussion 243
References 243
Chapter 29. LIQUID JET IMPACT MEASUREMENTS IN DIAMOND COATED Ge SUBSTRATES 244
Abstract 244
1. INTRODUCTION 244
2. EXPERIMENTAL METHODS 245
3. RESULTS 247
4. ACKNOWLEDGEMENTS 247
5. REFERENCES 247
PART V: POLISHING OF DIAMOND FILMS 248
Chapter 30. Reactive polishing of polycrystalline diamond and measured spectroscopic properties 250
Abstract 250
1. INTRODUCTION 250
2. EXPERIMENTAL 250
3. RESULTS AND DISCUSSION 251
4. CONCLUSIONS 252
5. ACKNOWLEDGEMENTS 252
6. REFERENCES 252
Chapter 31. Smoothing of diamond films by ion beam irradiation 254
Abstract 254
1. INTRODUCTION 254
2. ION BEAM IRRADIATION 254
3. SMOOTHING OF DIAMOND FILMS 255
4. CONCLUSIONS 259
5. REFERENCES 259
Chapter 32. Antireflection/antioxidation coatings and polishing results for PECVD diamond optics 260
Abstract 260
1. INTRODUCTION 260
2. EXPERIMENT 261
3. RESULTS 262
4. CONCLUSION 263
5. REFERENCES 264
Chapter 33. Polishing of CVD Diamond Film 268
Abstract 268
1. INTRODUCTION 268
2. CVD DIAMOND FILM USED AND THE POLISHING APPARATUS 268
3. OPTIMUM POLISHING CONDITIONS 269
4. POLISHING MECHANISM 270
5. CONCLUSION 272
REFERENCES 272
Chapter 34. Light - induced polishing of diamond films 276
Abstract 276
1. THEORY 276
2. DISCUSSION 279
3. CONCLUSION 282
4. REFERENCES 282
PART VI: THERMAL MANAGEMENT 284
Chapter 35. Application of Synthetic Diamond Substrates for Thermal Management of High Performance Electronic Multi-Chip Modules 286
Abstract 286
Background 286
Conventional 2-D MCM Applications 288
Potential for 3-Dimensional Packaging Approaches 290
Thermal Requirements / Diamond Advantages for 3-D Packaging 292
Summary 293
Chapter 36. "Critical Properties of CVD Diamond Films for Heat Sink and Thermal Radiator Applications" 294
References 295
Chapter 37. ELECTRONIC CIRCUITS ON DIAMOND SUBSTRATES 296
Abstract 296
Introduction 296
Thermal Studies 296
Diamond Substrate Evaluations 297
Conclusions 299
References 299
Chapter 38. Thermal conductivity measurement using the converging thermal wave technique 300
REFERENCES 301
Chapter 39. A Study of Diamond Laminated Surfaces in Evaporative Spray Cooling 302
Abstract 302
1. INTRODUCTION 302
2. THEORY 303
3. EXPERIMENTAL DESCRIPTION 304
4. Results and Discussion 305
5. Conclusions 307
6. Acknowledgements 308
7. REFERENCES 308
Chapter 40. Thermal Conductivity and Optical Transmission of CVD Diamond 310
Abstract 310
References 311
PART VII: DIAMOND ELECTRONICS 312
Chapter 41. NOVEL ELECTRON DEVICES based on the UNIQUE PROPERTIES OF DIAMOND 314
Abstract 314
Photodiodes 315
Transistors 317
NEA Devices 319
Heat Dissipation 320
Chapter 42. Fabrication and Properties of Diamond Devices 322
Abstract 322
1. INTRODUCTION 322
2 . FABRICATION OF FET 323
3. RESULTS AND DISCUSSION 324
4. CONCLUSION 326
6. References 327
Chapter 43. A Review of the Electrical Characteristics of Metal Contacts on Diamond 328
Abstract 328
1. INTRODUCTION 328
2. EFFECT OF HYDROGEN ON CONTACTS ON CVD FILMS 329
3. EFFECT OF SURFACE PREPARATION ON METAL CONTACTS 330
4. OHMIC CONTACTS 330
5. RECTIFYING CONTACTS 331
6. SUMMARY 333
7. ACKNOWLEDGEMENTS 333
8. REFERENCES 333
Chapter 44. DIAMOND COLD CATHODES 336
References 336
Chapter 45. Thin film diamond microstructure applications 338
Abstract 338
1. DIAMOND THIN FILM PATTERNING 338
2. MICROSTRUCTURES 339
REFERENCES 345
Chapter 46. Applications of Diamond — like Carbon Films to Electronic Components 346
Abstract 346
1. INTRODUCTION 346
2. APPLICATION TO METAL EVAPORATED TAPE 346
3. APPLICATION TO VTR CYLINDER 350
4. CONCLUSIONS 353
5. ACKNOWLEDGMENT 353
6. REFERENCES 353
Chapter 47. Ion beams and diamond: modification, doping, growth and simple devices 354
Abstract 354
1. INTRODUCTION 354
2. MODIFICATION 355
3. DOPING 356
4. GROWTH 357
5. SOME SIMPLE DEVICES 358
6. REFERENCES 361
Chapter 48. ELECTRICAL AND ELECTRONIC PROPERTIES OF DIAMOND FILMS 362
Abstract 362
1. INTRODUCTION 362
2. EXPERIMENTAL DETAILS 362
3. RESULTS 363
4. DISCUSSION AND CONCLUSIONS 366
5. ACKNOWLEDGEMENTS 367
6. REFERENCES 367
Chapter 49. Temperature dependent photoconductivity measurements on type lia diamonds and polycrystalline diamond films 368
Abstract 368
1. INTRODUCTION 369
2. RESULTS IN SINGLE-CRYSTAL IIA SAMPLES 369
3. RESULTS EST POLYCRYSTALLINE FILMS 371
4. CONCLUSIONS 373
5. ACKNOWLEDGEMENT 373
6. REFERENCES 373
Chapter 50. Optical Sciences Division , Code 6522 Naval Research Laboratory Washington , DC 20375 - 5000 374
Abstract 374
Chapter 51. CHARACTERIZATION OF TITANIUM SILICIDE CONTACTS DEPOSITED O N SEMICONDUCTING DIAMOND SUBSTRATES 380
Abstract 380
1. INTRODUCTION 380
2. EXPERIMENTAL PROCEDURE 380
3. RESULTS AND DISCUSSION 381
3. CONCLUSION 384
4. ACKNOWLEDGEMENTS 384
5. REFERENCES 384
Chapter 52. Interface Reactions of Titanium on Single Crystal and Thin Film Diamond Analyzed by UV Photoemission Spectroscopy 386
Abstract 386
Introduction 386
Experimental 387
Results and Discussion 387
Summary 391
Acknowledgements 391
References 391
Chapter 53. Diamond films for thermionic applications 392
Abstract 392
1. INTRODUCTION 392
2. EXPERIMENTAL 392
3. RESULTS 393
4. DISCUSSION 396
5. CONCLUSION 397
6. REFERENCES 397
7. ACKNOWLEDGMENT 397
Chapter 54. CVD Diamond Coated Cylinders for Advanced Thermionic Fuel Element 398
Abstract 398
1. INTRODUCTION 398
2. EXPERIMENTAL 400
3. RESULTS 400
4. DISCUSSION 403
PART VIII: DIAMOND NUCLEATION AND SELECTIVE DEPOSITION 404
Chapter 55. Effect of Substrate Materials on CVD Diamond Growth 406
Abstract 406
1. Introduction 406
2. Experimental 406
3. Results 407
4. Summary 408
Acknowledgements 408
Reference 408
Chapter 56. INFLUENCE OF SUBSTRATE TOPOGRAPHY ON THE NUCLEATION OF DIAMOND THIN FILMS 410
Abstract 410
1. INTRODUCTION 410
2. EXPERIMENTAL 411
3. RESULTS 411
4. CONCLUSIONS 414
6. ACKNOWLEDGEMENTS 415
6. REFERENCES 415
Chapter 57. METASTABLE SURFACE RECRYSTALLIYATION OF DIAMOND FROM THE LIQUID PHASE : SUBSTRATE EFFECTS 416
Abstract 416
1. INTRODUCTION 416
2. EXPERIMENTAL 417
3. RESULTS AND DISCUSSION 417
4. CONCLUSIONS 421
5. REFERENCES 421
Chapter 58. Enhancement of diamond nucleation by graphite fibers local to substrate surfaces in H2-CH4 rf discharges 422
Abstract 422
1.0 INTRODUCTION 422
2.0 EXPERIMENTAL RESULTS 423
3.0 DISCUSSION 423
5.0 REFERENCES 425
Chapter 59. Nucleation behavior of hot filament CVD diamond 426
ABSTRACT 426
1. INTRODUCTION 426
2. EXPERIMENTAL PROCEDURE 427
3. RESULTS AND DISCUSSION 428
4. CONCLUSION 430
5. REFERENCES 430
Chapter 60. Nucleation of diamond onto silicon by low pressure plasma-CVD 432
Abstract 432
1. INTRODUCTION 432
2. EXPERIMENTAL 432
3. RESULTS AND DISCUSSION 433
4. CONCLUSION 437
5. REFERENCES 437
6 . ACKNOWLEDGEMENT 437
Chapter 61. Selective growth, characterization, and microstructure fabrication of undoped and doped polycrystalline diamond thin films 438
Abstract 438
1. INTRODUCTION 438
2. EXPERIMENTAL 439
3. RESULTS AND DISCUSSION 441
4. ACKNOWLEDGMENTS 442
5. REFERENCES 443
Chapter 62. LASER-ASSISTED SELECTIVE AREA DEPOSITION OF DIAMOND FILMS 444
Abstract 444
1. INTRODUCTION 444
2. EXPERIMENTAL 444
3. RESULTS AND DISCUSSION 445
4. REFERENCES 448
Chapter 63. Electrophoretic Deposition of Colloidal Diamond for Selective CVD Growth of Diamond Films 450
Abstract 450
1. INTRODUCTION 450
2. EXPERIMENTAL 451
3. RESULTS and DISCUSSION 452
4. REFERENCES 455
PART IX: HIGH-RATE AND LARGE-AREA DIAMOND FILM PRODUCTION 456
Chapter 64. Growth Process of Diamond Film by Arc Discharge Plasma Jet CVD 458
Abstract 458
1. Introduction 458
2. Nucleation density of diamond 459
3. Growth process of diamond after nucleation 460
Acknowledgments 465
References 465
Chapter 65. Synthesis of Large Area Diamond Films By A Low Pressure DC Plasma Jet 466
Abstract 466
1. INTRODUCTION 466
2. MAGNETOPLASMADYNAMIC ARC JET PERFORMANCE 466
3. DIAMOND FILM PROPERTIES 467
4. DIAMOND FILM COSTS 468
5. CONCLUSIONS 469
6. REFERENCES 471
Chapter 66. A NEW CLASS OF CVD DIAMOND COMPOSITE MATERIALS FOR COST-SENSITIVE, LARGE-AREA APPLICATIONS 472
Chapter 67. Upscaling of the Hot-Filament CVD Process for Deposition of Diamond Films on Large-Area Substrates 480
Abstract 480
1. INTRODUCTION 480
2. EXPERIMENTAL 480
3. RESULTS AND DISCUSSION 481
4. CONCLUSIONS 486
5. ACKNOWLEDGEMENTS 486
6. REFERENCES 486
Chapter 68. Formation of functionally gradient diamond films 488
ABSTRACT 488
1. INTRODUCTION 488
2. FORMATION OF FUNCTIONALLY GRADIENT DIAMOND FILMS 489
3. EXPERIMENT 489
4. RESULTS AND DISCUSSION 490
5. SUMMARY 493
6. REFERENCES 493
PART X: DIAMOND GROWTH 494
Chapter 69. Fabrication Process of Diamond Materials by HPHT Methods 496
Chapter 70. Combustion Flame Diamond Coating Method (Hirose Method) from its Birth to the Present
Abstract 498
Chapter 71. Selected Nucleation Epitaxy (SENTAXY) and State-of-the-Art and Future Scope of Diamond Active Devices 500
Abstract 500
Chapter 72. THE STATE OF THE ART IN STUDIES OF DIAMOND SYNTHESIS FROM THE GASEOUS PHASE AND SOME UNSOLVED PROBLEMS 502
Abstract 502
1. INTRODUCTION 502
2. THERMODYNAMICS OF THE CARBON-HYDROGEN SYSTEM 502
3. SELECTIVITY IN THE NUCLEATION AND GROWTH OF DIAMOND 504
4. THERMAL PROPERTIES OF THE SYSTEM CONSISTING OF THE GASEOUS PHASE AND THE SUBSTRATE 505
5. ROLE OF THE GEOMETRY OF THE SOURCE-SUBSTRATE SYSTEM 507
6. SOME WAYS OF IMPROVING AND DEVELOPING METHODS USED IN GAS-PHASE DIAMOND SYNTHESIS 508
REFERENCES 508
Chapter 73. Effects of multiple filament geometry in the hot filament deposition of diamond films 510
Abstract 510
1. INTRODUCTION 510
2. EXPERIMENTAL 511
3. RESULTS AND DISCUSSION 511
4. CONCLUSIONS 514
5. ACKNOWLEDGEMENT 515
6. REFERENCES 515
Chapter 74. Growth mechanisms of CVD diamond films determined by a novel TEM technique 516
Abstract 516
1. INTRODUCTION 516
2. EXPERIMENTAL METHOD 516
5. EXPERIMENTAL RESULTS 517
4. CONCLUSIONS 521
Acknowledgement 521
References 521
Chapter 75. Heteroepitaxy of carbon on copper by high temperature ion implantation 522
References 523
Chapter 76. Diamond film deposition using microwave plasmas under low pressures 524
Abstract 524
1. INTRODUCTION 524
2. EXPERIMENT 525
3. RESULTS AND DISCUSSION 526
4. SUMMARY 529
5. ACKNOWLEDGEMENTS 529
6. REFERENCES 529
Chapter 77. The growth of diamond film by flat flame combustion method 530
Abstract 530
1. Introduction 530
2. Experimental Apparatus and Method 530
3. Results and Discussion 532
4 . Conclusion 535
5. References 535
Chapter 78. Heat transfers for diamond deposition controlling 536
Abstract 536
1. INTRODUCTION 536
2. EXPERIMENTAL SETUPS 537
3. RESULTS 537
4. DISCUSSION AND CONCLUSION 541
References 541
Chapter 79. THE INFLUENCE OF SURFACE ROUGHNESS AND GRAIN SIZE ON ARC JET DIAMOND APPLICATIONS 542
Abstract 542
1. INTRODUCTION 542
2. CUTTING TOOLS 543
3. IR WINDOWS 544
4. CONCLUSION 545
5. REFERENCES 547
Chapter 80. Growth Shape of Diamond in C-H-O System 548
Abstract 548
1. INTRODUCTION 548
2. EXPERIMENTAL PROCEDURE 549
3. RESULTS AND DISCUSSION 550
4. CONCLUSION 553
5. REFERENCES 553
Chapter 81. The Orientation of Diamond Crystal Face Synthesized by the Combustion Flame Method 554
Abstract 554
1. INTRODUCTION 554
2 . EXPERIMENTAL 555
3. RESULTS 556
4. Discussion 556
5. REFERENCES 558
Chapter 82. Research of the growth and nucleation mechanisms of diamond film by optical emission spectra and Raman spectra 560
Abstract 560
1. INTRODUCTION 560
2. EXPERIMENTAL 560
3. THE IN SITU OBSERVATIONS OF THE OES 561
4. OBSERVATIONS OF THE RAMAN SPECTRA 563
5. REFERENCES 563
Chapter 83. Synthesis of Diamond Films by Using Hot Filament CVD with Acetone Hydrogen Mixture 564
Abstract 564
1. INTRODUCTION 564
2. EXPERIMENT 564
3. RESULTS AND DISCUSSIONS 565
4. REFERENCES 568
Chapter 84. Influence of Gas Phase Parameters on the deposition kinetics and morphology of thin diamond films 570
Abstract 570
Introduction 570
Experimental 570
Results and Discussion 571
Other Process Gases 573
Conclusion 575
References 575
Chapter 85. Monitoring of crystal defects in natural diamond 576
Abstract 576
1. INTRODUCTION 576
2. THE SPECIMENS AND THEIR ORIENTATION MEASUREMENT 577
3. THE EXPERIMENTS AND RESULTS 578
4. THE CONCLUSION AND DISCUSSION 580
5. REFERENCES 581
Chapter 86. CVD diamond growth with hot filament processes 582
Abstract 582
1. INTRODUCTION 582
2. EXPERIMENTAL DETAILS 582
3. RESULTS AND DISCUSSION 584
4. REFERENCES 587
Chapter 87. Diamond Deposition by Hot Filament and Microwave CVD: Influence of Deposition Parameters on Phase Purity, Surface Roughness and Film Quality 588
Abstract 588
1 HFCVD 588
2 Stress Measurements 591
Acknowledgments 593
References 593
PART XI: HALOGEN ASSISTED DIAMOND GROWTH 594
Chapter 88. Thermochemical vapor deposition of diamond in a carbon-halogenoxygen and/or sulfur atmospheric hot wall reactor 596
Abstract 596
1. INTRODUCTION 596
2. EXPERIMENTAL 597
3. RESULTS 598
4. CONCLUSIONS 602
5. ACKNOWLEDGEMENTS 602
6. REFERENCES 603
Chapter 89. The growth of diamond film by halogenated methane 604
Abstract 604
1. Introduction 604
2. Experimental Apparatus and Procedures 605
3. Result and Discussion 606
4· Conclusion 607
Chapter 90. Dense Nucleation of Polycrystalline Diamond Films Using CF4 - H2 Low Pressure rf Discharges 610
Abstract 610
1. INTRODUCTION 610
2. EXPERIMENTAL 611
3. RESULTS AND DISCUSSION 611
4. CONCLUSIONS 614
5. REFERENCES 615
PART XII: MODELING AND STANDARDS 616
Chapter 91. Computer Modeling of A Hot Filament Diamond Deposition Reactor 618
Abstract 618
1. INTRODUCTION 618
2. MODEL 618
3. RESULTS AND DISCUSSION 620
4. ACKNOWLEDGEMENTS 623
5. REFERENCES 623
Chapter 92. Model for the hydrogen atom flux developed in a microwave plasma jet under diamond synthesis conditions 624
Abstract 624
1. INTRODUCTION 624
2. DIAMOND SYNTHESIS CONDITIONS 625
3. MODEL 625
4. RESULTS 626
5. REFERENCES 627
Chapter 93. Requirements of a standard for the chemical characterization of CVD diamond by Raman spectroscopy 630
Abstract 630
1. INTRODUCTION 630
2. CHEMICAL CHARACTERIZATION OF CVD DIAMOND 631
3. RAMAN SPECTROSCOPY OF CVD DIAMOND 632
4. PROPOSED STANDARD FOR RAMAN CHARACTERIZATION OF CVD DIAMOND 635
5. REFERENCES 636
Chapter 94. Diffusion Coefficient of Electrons in Diamond 638
Abstract 638
1. INTRODUCTION 638
2. MONTE CARLO MODEL 639
3. RESULTS AND DISCUSSION 639
4. SUMMARY 641
5. REFERENCES 641
Chapter 95. Monte-Carlo simulation of electron properties in a magnetized microwave discharge 642
Abstract 642
1. INTRODUCTION 642
2. FIELD ANALYSIS 643
3. COMPUTER SIMULATION 644
4. RESULTS 645
5. CONCLUDING REMARKS 646
References 646
PART XIII: ECONOMIC ANALYSIS OF DIAMOND TECHNOLOGY 648
Chapter 96. Economic Assessment of HPHT Diamond Synthesis Technology 650
Abstract 650
1. Introduction 650
2. Background Information 651
3. Results & Discussion
4. Conclusions 659
5. Acknowledgements 660
6. References 660
Chapter 97. Economie Assessment of CVD Diamond Synthesis Technologies 662
Abstract 662
1. Introduction 663
2. Background Information 664
3. Results and Discussion 669
4. Conclusions 670
5. Acknowledgments 671
6. References 671
PART XIV: CUBIC BORON NITRIDE (CBN) TECHNOLOGY AND APPLICATIONS 672
Chapter 98. GROWTH AND POLAR PROPERTIES OF CUBIC BORON NITRIDE 674
Abstract 674
1. INTRODUCTION 674
2. GROWTH HABIT AND SURFACE MORPHOLOGY 674
3. ETCHING OF CUBIC BN CRYSTALS 675
4. CRYSTALLOGRAPHIC POLARITY [7] 675
5. DISCUSSION 677
6. ACKNOWLEDGEMENTS 677
REFERENCES 678
Chapter 99. Characterizations of pulsed laser deposited boron nitride films 680
Abstract 680
1. INTRODUCTION 680
2. EXPERIMENTAL 681
3. DISCUSSION OF RESULTS 681
References 685
Chatper 100. A Deposition Method of cBN Filin and Potential Applications 688
Abstract 688
1. INTRODUCTION 688
2. FORMATION OF c-BN FILM BY MEANS OF A MAGNETICALLY ENHANCED PLASMA ION PLATING METHOD [MEP-IP METHOD] 688
3 . POTENTIAL APPLICATIONS OF c-BN FILM AND POSSIBLE PROBLEMS TO BE SOLVED 689
4. CONCLUSIONS 694
References 695
Chapter 101. A Tribological Study on Cubic Boron Nitride Film 696
Abstract 696
1. INTRODUCTION 696
2. EXPERIMENTAL 697
3. MACROSCOPIC TRIBOLOGICAL PROPERETIES 698
4. MICROSCOPIC TRIBOLOGICAL PROPERTIES 699
5. CONCLUSIONS 701
Acknowledgments 701
References 701
Chapter 102. WEAR RESISTANT BORON NITRIDE COATINGS 702
Abstract 702
1. INTRODUCTION 702
2. EXPERIMENTAL PROCEDURE 702
3· RESULTS 703
4. CONCLUSION 706
PART XV: PROTECTIVE COATINGS AND TRIBOLOGICAL APPLICATIONS OF DIAMOND-LIKE CARBON (DLC) FILMS 708
Chapter 103. Applications of diamond-like carbon in computer technology 710
Abstract 710
1. INTRODUCTION 710
2. EXPERIMENTAL 711
3. PROPERTIES of DLC 711
4. APPLICATIONS 712
REFERENCES 714
Chapter 104. Micro-tribological Properties and Applications of Super-hard and Lubricating Coatings 718
Abstract 718
1. INTRODUCTION 718
2. MICRO-TRIBOLOGICAL APPLICATION 719
3. BARD-LUBRICATING SURFACE CONSIDERATION IN MICRO-TRIBOLOGY 721
4. EXPERIMENTAL PROCEDURES 722
5. EXPERIMENTAL RESULTS AND DISCUSSION 722
6. CONCLUSIONS 725
7. REFERENCES 725
Chapter 105. Tribological studies of amorphous hydrogenated carbon films in a vacuum, spacelike environment 726
Abstract 726
1. INTRODUCTION 726
2. DESCRIPTION O F TRIBOEXPERIMENT 726
3. RESULTS A N D DISCUSSION 728
4. CONCLUDING REMARKS 728
5. REFERENCES 728
Chapter 106. Application of DLC films to Optical Windows and Tools 730
Abstract 730
1. INTRODUCTION 730
2. DIAMOND-LIKE CARBON COATINGS 731
3. DEPOSITION TECHNIQUES FOR INFRA RED OPTICAL APPLICATIONS 732
4. PROPERTIES OF DIAMOND-LIKE CARBON COATINGS ON GERMANIUM 733
5. DLC COATINGS ON ZINC SULPHIDE WINDOWS 734
6. APPLICATION OF CARBON COATINGS TO FRONT SURFACE ALUMINIUM MIRRORS 734
7. THE USE OF DLC COATINGS FOR PHOTOTHERMAL CONVERSION OF SOLARENERGY 735
8. MECHANICAL APPLICATIONS OF DIAMOND-LIKE CARBON LAYERS 736
9. MEDICAL APPLICATIONS OF DIAMOND-LIKE CARBON LAYERS 736
10. REFERENCES 737
Chapter 107. Application of Glow-discharge Plasma Deposited Diamond Like Film on Prosthetic Artificial Heart Valves 738
Abstract 738
1. INTRODUCTION 738
2. EXPERIMENTAL 739
3. RESULTS AND DISCUSSIONS 740
4. CONCLUSIONS 742
5. REFERENCES 743
PART XVI: MECHANICAL PROPERTIES AND APPLICATIONS OF DLC FILMS 744
Chapter 108. An Application of DLC Filin to Knife for Cutting Piled Aluminum Thin Sheets 746
Abstract 746
1. INTRODUCTION 746
2. EXPERIMENTAL 747
3. RESULTS 748
4. CONCLUSIONS 750
Acknowledgements 751
References 751
Chapter 109. Application of DLC film as protective coating of metallic filmtape 752
Abstract 752
1. INTRODUCTION 752
2. EXPERIMENTAL 753
3. RESULTS AND DISCUSSION 753
4. CONCLUSIONS 756
5. REFERENCES 756
Chapter 110. Diamond]ike thin films as protective layers 758
Abstract 758
1. IHTRODUCTIOH 758
2. EXPERIMENTAL DETAILS 759
3. RESULTS AHD DISCUSSIOH 759
4. CONCLUSION 763
REFEREHCES 763
Chapter 111. PLASMA DEPOSITED CARBON FILMS AS A POSSIBLE MEANS FOR DIVERTOR REPAIR 764
Abstract 764
1. INTRODUCTION 764
2. EXPERIMENTAL CONFIGURATION 765
3. DEPOSITION PARAMETERS AND STRUCTURE OF THE COATINGS 766
4. CONCLUSIONS 769
5. ACKNOWLEDGEMENT 769
6. REFERENCES 769
Chapter 112. Adhesion and mechanical properties of amorphic diamond films prepared by a laser plasma discharge source 770
Abstract 770
1. INTRODUCTION 770
2. SAMPLE PREPARATION AND STRESS MEASUREMENT 771
3. INTERFACIAL LAYER FORMATION 773
4. PROTECTIVE COATINGS OF AMORPHIC DIAMOND 774
5. ACKNOWLEDGMENT 775
6. REFERENCES 775
Chapter 113. Mechanical characterisation of laser plasma diamond prepared without hydrogen 776
Abstract 776
1. INTRODUCTION 776
2. EXPERIMENTAL 777
3. RESULTS AND DISCUSSION 778
4. CONCLUSIONS 780
5. ACKNOWLEDGEMENTS 780
6. REFERENCES 780
Chapter 114. MIS photosen sor with athin diamond - like carbon films as the insulating layer 784
References 786
Chapter 115. Character is tics of arever sible memory elements using a diamond - like carbon films as the storing medium 788
References 790
Chapter 116. Electric and photoelectric characteristics of MQW structures based on diamond - like carbon films 792
References 795
PART XVII: DLC AND SiC ELECTRONICS 782
Chapter 117. Silicon carbide devices for active electronics and optoelectronics 796
Abstract 796
1. EPITAXIAL GROWTH 796
2. EPITAXIAL LAYERS 797
3. PN JUNCTIONS 798
4. SILICON CARBIDE DEVICES 798
5. REFERENCES 801
PART XVIII: DLC OPTICS 802
Chapter 118. Study of a-C:H material as protective coating for CO2 laser copper mirrors 804
Abstract 804
1. INTRODUCTION 804
2. FILM DEPOSITION 804
3. MECHANICAL AND STRUCTURAL PROPERTIES 805
4. LASER DAMAGE THRESHOLD MEASUREMENTS 806
5. CONCLUSIONS 809
6. REFERENCES 809
Chapter 119. Magnetron Sputtered DLC Coatings for KC1 Optics for High Power Industrial CO2 Laser 810
Abstract 810
1. Introduction 810
2. Experimental 811
3. Results and discussion. 811
4. Conclusions 816
5. References 816
Chapter 120. Applications of diamond-like carbon films to optical windows 818
Abstract 818
1. INTRODUCTION 818
2. SAMPLE PREPARATION 818
3. RESULTS 819
4. REFERENCES 820
Chapter 121. Antireflection, hard carbon coatings for IR optics 822
Abstract 822
1. INTRODUCTION 822
2. EXPERIMENTAL 823
3. RESULTS AND DISCUSSION 823
CONCLUSIONS 824
REFERENCES 825
Chapter 122. LASER INDUCED GRAPHITIZATION OF DIAMOND-LIKE CARBON FILMS: APPLICATIONS TO OPTICAL STORAGE 826
Abstract 826
1. INTRODUCTION 826
2. EXPERIMENTAL 827
3. RESULTS AND DISCUSSIONS 827
4. ACKNOWLEDGMENTS 829
5. R E F E R E N C E S 830
Chapter 123. LUMINESCENCE IN DIAMOND-LIKE CARBON THIN FILMS 832
Abstract 832
1. INTRODUCTION 832
2. REVIEW OF LUMINESCENCE DATA 833
3. MODEL DENSITY OF STATES 833
4. CALCULATION OF THE PHOTOLUMINESCENCE SPECTRUM 834
5. DISCUSSIONS 835
6. REFERENCES 837
Chapter 124. Optical properties and structure of an annealed hydrogenated amorphous silicon-carbon alloy film 838
Abstract 838
1. INTRODUCTION 838
2. EXPERIMENT 839
3. RESULTS AND DISCUSSION 839
4. CONCLUSION 843
5. ACKNOWLEDGEMENTS 843
6. REFERENCES 843
PART XIX: DLC DEPOSITION TECHNOLOGY 844
Chapter 125. Preparation and properties of amorphous carbon and hydrocarbon films 846
Abstract 846
1. INTRODUCTION 846
2. SAMPLE PREPARATION 847
3. LAYER ANALYSIS 848
4. RESULTS 848
5. DISCUSSION 851
6. ACKNOWLEDGMENTS 853
7. REFERENCES 853
Chapter 126. Large area deposition of diamond-like carbon by ion-beam decomposition of polyphenyl ether 854
Abstract 854
1. INTOODUCTION 854
2. EXPERIMENTAL 856
3. RESULTS AND DISCUSSION 857
4. CONCLUSIONS 857
5. ACKNOWLEDGEMENTS 857
& REFERENCES
Chapter 127. Diamond-like carbon from the ion-beam decomposition of polyphenyl ether 860
Abstract 860
1. INTRODUCTION 860
2. EXPERIMENTAL 861
3. RESULTS A N D DISCUSSION 862
4. CONCLUSIONS 864
5. ACKNOWLEDGEMENTS 865
a REFERENCES 865
Chapter 128. The A - C : H Films eposited By PECV D Metlxoci 866
Abstract 866
1· Introduction 866
2· Experimental results 866
3 . Analysis and discussion 870
4 · Conclusion 871
5 . REFERENCE 871
Chapter 129. Hard carbon coatings by the pulsed arc-discharge method 872
Abstract 872
1. INTRODUCTION 872
2. ARC-DISHARGE DEPOSITION 872
3. EXPERIMENTAL 873
4. RESULTS 875
5. DISCUSSION AND CONCLUSIONS 877
6. REFERENCES 877
Chapter 130. Plasma deposition and etching of diamond-like carbon films 878
Abstract 878
1. INTRODUCTION 878
2. EXPERIMENTAL 879
3. RESULTS AND DISCUSSION 879
4. SUMMARY AND CONCLUSIONS 883
5. REFERENCES 883
Chapter 131. Laser Detonation DLC Films 884
Abstract 884
1. INTRODUCTION 884
2. EXPERIMENTAL 884
3. RESULTS 886
4. CONCLUSIONS 888
5. ACKNOWLEDGEMENTS 889
6. REFERENCES 889
Chapter 132. Super-Hard Diamond-Like Carbon Prepared by a New Ionized Method 890
Abstract 890
1. INTRODUCTION 890
2. DEPOSITION TECHNIQUE 890
3. FILM PROPERTIES AND RESULTS 890
AUTHOR INDEX 892
SUBJECT INDEX 896