Epitaxial Growth (eBook)

Front Cover 
1 
Epitaxial Growth 4
Copyright Page 
5 
Table of Contents 
6 
LIST OF CONTRIBUTORS 8
PREFACE 
10 
CONTENTS OF PART A 12
CHAPTER 4. NUCLEATION OF THIN FILMS 
16 
I. Introduction: The Mechanisms of Nucleation and Growth 17
II. Regimes of Condensation 22
III. Quantitative Description of the Nucleation Process 28
IV. Solutions of the Rate Equations 38
V. Effects of Imperfections 50
VI. Experimental Examples 52
VII. Nucleation and Epitaxy 64
ACKNOWLEDGMENTS 67
References 67
CHAPTER 5. DEFECTS IN EPITAXIAL DEPOSITS 
72 
I. Introduction 72
II. Nucleation and Growth of Epitaxial Films 73
III. Dislocations 77
IV. Stacking Faults 86
V. Twinning 93
VI. Multiply Twinned Particles 105
VII. Defects in Alloys and Compounds 116
VIII. Conclusions 
124 
ACKNOWLEDGMENTS 124
References 124
CHAPTER 6. 
 
 
128 
I. Introduction 129
II. Thin Films 132
III. Semiinfinite Overgrowths 139
IV. Misfit Dislocation Energy in Overgrowths of Finite Thickness 145
V. Stability of Growing Epitaxial Crystals 153
VI. Small Epitaxial Islands 158
References 162
CHAPTER 7. ENERGY OF INTERFACES BETWEEN CRYSTALS: AN AB INITIO APPROACH 
164 
I. Introduction 165
II. The Interface Problem from First Principles 166
III. Symmetry Considerations and Coincidence Lattices 167
IV. Interface Energy as a Variational Problem 169
V. The Coincidence Boundary in Reciprocal Space 171
VI. The Interface Problem in Reciprocal Space 173
VII. The Elastic Problem 176
VIII. The Variational Problem in Reciprocal Space 
177 
IX. The Interaction Potential 180
X. Calculations with a Model Potential 181
XI. An Ab Initio Potential for Aluminum 
184 
XII. Surface Entropy and Free Energy 
188 
XIII. Relation to Epitaxial Growth 190
References 192
CHAPTER 8. COHERENT INTERFACES AND MISFIT DISLOCATIONS 
194 
I. Introduction 195
II. Predictions 197
III. Observations of Coherency Strains 207
IV. Observations of Misfit Dislocations 209
V. The Generation of Misfit Dislocations 216
VI. Misfit Dislocations and the Alignment of Deposits 228
VII. Behavior of Misfit Dislocations during Diffusion 233
VIII. Role of Misfit Dislocations in Diffusion 241
ACKNOWLEDMENTS 242
References 242
CHAPTER 9. LIST OF EPITAXIAL SYSTEMS 
246 
I. Introduction 246
II. Classification and Nomenclature 247
III. Index of Overgrowth (Deposit or Film) Materials 251
IV. List of Epitaxial Systems 253
ACKNOWLEDGMENTS 253
9 LIST OF EPITAXIAL SYSTEMS 254
INDEX 310