Optical Characterization of Real Surfaces and Films (eBook)

Front Cover 
1 
Physics of Thin Films: Optical Characterization of Real Surfaces and Films 4
Copyright Page 
5 
Table of Contents 6
Contributors 10
Preface 12
Chapter 1. In Situ Studies of Crystalline Semiconductor Surfaces by Reflectance Anisotropy 18
I. Introduction 19
II. The Reflectance Anisotropy Technique 20
III. Applications of RA to the Growth of III–V Semiconductors 28
IV. Growth of Lattice-Mismatched III–V and II–VI Structures 55
V. Summary and Conclusions 60
References 62
Chapter 2. Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part I: Tetrahedrally Bonded Materials 66
I. Introduction 67
II. Techniques of Real-Time Spectroscopic Ellipsometry 71
III. Studies of Tetrahedrally Bonded Thin Films 78
IV. Summary 133
Acknowledgments 138
References 139
Chapter 3. Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part II: Aluminum 144
I. Introduction 144
II. Theoretical Background 147
III. Experimental Apparatus for Real-Time Monitoring 164
IV. Results and Discussion 166
V. Summary 200
Acknowledgments 204
References 204
Chapter 4. Optical Characterization of Inhomogeneous Transparent Films on Transparent Substrates by Spectroscopic Ellipsometry 208
I. Introduction 208
II. Inhomogeneity in Thin Films 210
III. Experimental 213
IV. Experimental Results on Transparent Films 232
V. Discussion 248
VI. Summary and Conclusion 260
References 261
Chapter 5. Characterization of Ferroelectric Films by Spectroscopic Ellipsometry 266
I. Introduction 266
II. Description of the SE System 271
III. Experimental Procedure 273
IV. Results and Discussion 275
V. Relation between Film Microstructure and Electrical Properties 289
VI. Conclusions 292
Acknowledgments 293
References 293
Chapter 6. Effects of Optical Anisotropy on Spectro-ellipsometric Data for Thin Films and Surfaces 296
I. Introduction 296
II. The Generalized Approach 300
III. Comparison with Available Data and Previous Methods 308
IV. Simulations of Anisotropic Effects 312
Acknowledgment 329
References 330
Author Index 332
Subject Index 340