Ultraviolet Laser Technology and Applications -  David L. Elliott

Ultraviolet Laser Technology and Applications (eBook)

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2014 | 1. Auflage
350 Seiten
Elsevier Science (Verlag)
978-1-4832-9651-7 (ISBN)
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Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself; moving through the optics, sources, and systems; and concluding with detailed descriptions of applications in various fields.
The text enables practicing engineers and researchers to utilize concepts and innovations to solve actual problems encountered in UV optical technology applications. It also offers a wealth of information for equipment designers and manufacturers.
Those in laser fields (including medical, electronics, and semiconductors), students, engineers, technicians, as well as newcomers to the subject who require a basic introduction to the topic, will all find Ultraviolet Laser Technology and Applications to be an essential resource.
Key Features
* Serves as a valuable, practical reference to UV laser technology
* Presents detailed technical data and techniques
* Offers highly illustrated optics designs and beam delivery systems
* Includes an extensive bibliography, references, and glossary
* Covers all major UV laser markets and technology systems
Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself; moving through the optics, sources, and systems; and concluding with detailed descriptions of applications in various fields. The text enables practicing engineers and researchers to utilize concepts and innovations to solve actual problems encountered in UV optical technology applications. It also offers a wealth of information for equipment designers and manufacturers. Those in laser fields (including medical, electronics, and semiconductors), students, engineers, technicians, as well as newcomers to the subject who require a basic introduction to the topic, will all find Ultraviolet Laser Technology and Applications to be an essential resource. Serves as a valuable, practical reference to UV laser technology Presents detailed technical data and techniques Offers highly illustrated optics designs and beam delivery systems Includes an extensive bibliography, references, and glossary Covers all major UV laser markets and technology systems

Front Cover 1
Ultraviolet Laser Technology and Applications 4
Copyright Page 5
Table of Contents 6
Preface 12
Acknowledgments 16
Chapter 1. Ultraviolet Light 18
1.1 Introduction 18
1.2 The Ultraviolet Spectrum 18
1.3 Historical Development of the Laser 20
1.4 How a Laser Works 21
1.5 UV Sources 27
1.6 UV Lasers 33
1.7 Inert Gas UV Lasers 38
1.8 Metal Vapor Lasers 39
1.9 Nitrogen Lasers 40
1.10 Helium-Neon Lasers 40
1.11 The Alexandrite Laser 41
References 43
Glossary of Terms 43
Reading Bibliography 47
Chapter 2. Ablation 50
2.1 The Ablation Phenomenon 50
2.2 Background and History of Ablation 51
2.3 Early Discoveries and Uses of Ablation 52
2.4 Ablation Mechanisms 53
2.5 Practical Characteristics of UV Reactions 63
References 71
Glossary of Terms 73
Reading Bibliography 75
Chapter 3. The Excimer Laser 84
3.1 Introduction 84
3.2 History 84
3.3 Theory of Operation 85
3.4 The Gain Profile 87
3.5 Excimer Laser Subsystems 88
3.6 Laser Operation 92
3.7 Laser Installation 99
3.8 Laser Maintenance 99
3.9 Gas Safety Guidelines 102
3.10 UV Safety 103
References 105
Glossary of Terms 106
Reading Bibliography 107
Chapter 4. UV Materials Research 112
4.1 Introduction 112
4.2 Laser Mass Spectral Analysis 112
4.3 157-nm Fluorine Laser Processing 115
4.4 Production of X-Rays with 248 nm Energy 116
4.5 Excimer Laser-Induced Fluorescence 117
4.6 Tunable UV Laser 118
4.7 Laser Chemical Vapor Deposition 120
4.8 Surface Analysis by Laser Ionization 121
4.9 Photopolymer Research 121
4.10 Laser Treatment of Organosilicons 124
4.11 UV Laser Cleaning 124
4.12 Cross-Sectioning Delicate Structures 127
References 127
Glossary of Terms 128
Reading Bibliography 129
Chapter 5. UV Optics and Coatings 140
5.1 Introduction 140
5.2 UV Optical Requirements 141
5.3 UV Optical Materials 142
5.4 Radiation Damage 143
5.5 Coating Manufacture 145
5.6 UV Coatings and Reflection 147
5.7 Extreme UV Coatings 148
5.8 Single Layer Antireflection Coatings 151
5.9 Multilayer Antireflection Coatings 153
5.10 Dielectric Reflector Coatings 155
5.11 Metal Reflector Coatings 157
5.12 UV Coating Types by Application 162
5,13 Coating Damage and Defects 168
5.14 Coating versus Polarization 173
5.15 Optical Fiber Beam Delivery 175
References 176
Glossary of Terms 178
Reading Bibliography 181
Chapter 6. UV Laser Cleaning 190
6.1 Introduction 190
6.2 Technology Factors in Surface Contamination 191
6.3 Size of Contaminants 192
6.4 Contamination 194
6.5 Integrated Circuit Cleaning 194
6.6 Thin Film Heads 198
6.7 Flat Panel Display Cleanings 201
6.8 Compact Discs 204
6.9 Printed Circuit Boards 208
6.10 Cleaning Semiconductor Surfaces 213
6.11 Laser Ablative Cleaning 216
6.12 Debris Removal 218
References 222
Glossary of Terms 223
Reading Bibliography 224
Chapter 7. Annealing and Planarizing 226
7.1 Introduction 226
7.2 Annealing Parameters 227
7.3 Laser versus Electron Beam 230
7.4 Pulsed versus Continuous Lasers 231
7.5 Annealing Process Control 232
7.6 Laser Planarization 237
7.7 IC Topography Problems 238
7.8 Resist Imaging on Topography 240
7.9 Planarization with Polymer Coatings 242
7.10 Nonlaser Thermal Planarization 243
7.11 UV Laser Planarization 243
References 261
Glossary of Terms 262
Reading Bibliography 263
Chapter 8. Deep-UV Microlithography 268
8.1 Introduction 268
8.2 Evolution of Deep-UV Lithography 268
8.3 Deep-UV Technology: Resolution 271
8.4 Resolution: The "k" parameter 271
8.5 Exposing Wavelength 273
8.6 Deep-UV Laser Wafer Stepper 274
8.7 Optical Materials for Deep-UV Imaging 276
8.8 Deep-UV Light Sources: Mercury Lamps 277
8.9 Line-Narrowed Excimer Laser Subsystems 278
8.10 Coherence 283
8.11 Measurement of Wavelength and Bandwidth 284
8.12 Laser Performance 286
8.13 Laser Maintenance 287
8.14 Utilities 289
References 289
Glossary of Terms 290
Reading Bibliography 294
Chapter 9. Micromachining 304
9.1 Introduction 304
9.2 Micromachining Processes 305
9.3 Direct Ablation 307
9.4 Micromachining Applications 312
9.5 Three-Dimensional UV Microforming 317
9.6 Microelectromechanical Systems 323
9.7 Failure Analysis Applications 325
9.8 Wire Stripping and Fiber Taps 325
References 328
Glossary of Terms 329
Reading Bibliography 330
Chapter 10. UV Lasers in Medicine 334
10.1 Introduction 334
10.2 Applications 334
10.3 UV Laser Advantages in Medicine 335
10.4 UV Laser Angioplasty 337
10.5 Corneal Sculpting 342
10.6 Microbiology Research 344
10.7 Laser Microsurgery 346
10.8 Catheter Machining Optics 349
References 350
Glossary of Terms 351
Reading Bibliography 352
Index 356

Chapter 1

Ultraviolet Light


Publisher Summary


Ultraviolet (UV) light has become important as the various technologies that are necessary to provide practical UV laser imaging and beam delivery systems have progressed, especially the light sources. UV light has been available only from low power lamps, thereby restricting the usefulness of the technology. The discovery and development of the excimer laser made possible the availability of intense ultraviolet light. Researchers explored and uncovered the unique properties of this new light source. As various phenomena involving UV energy and material interactions were discovered and optimized, practical applications emerged. This chapter discusses the UV spectrum, early UV lamp sources, laser physics and operating principles, and development leading to the discovery of the UV laser. UV light is available from a variety of sources, including naturally occurring UV light, UV lamps, and UV lasers. UV light from the sun is abundant, but cannot be easily or economically harnessed for the applications that have practical value. To a lesser degree, UV lamps have the same problem: they supply rich amounts of the ultraviolet wavelengths, but by the time the energy is collected and transmitted through an optical system, little energy is left to meet the demands of most commercial applications.

1.1 Introduction


Ultraviolet light has become more important in recent years as the various technologies necessary to provide practical UV laser imaging and beam delivery systems have progressed, especially the light sources. Historically, UV light has been available only from relatively low power lamps, thereby restricting the usefulness of the technology. The discovery and development of the excimer laser in the 1980s made possible, for the first time, the availability of intense ultraviolet light. Researchers explored and uncovered the unique properties of this new light source. As various phenomena involving UV energy and material interactions were discovered and optimized, practical applications emerged. In this chapter, we discuss the UV spectrum, early UV lamp sources, laser physics and operating principles, and development leading to the discovery of the UV laser.

1.2 The Ultraviolet Spectrum


The “ultraviolet” is a small portion of the electromagnetic spectrum, yet within its boundaries there are three distinct regions (near, mid, and far UV), each with particular significance in terms of applications and properties. Ultraviolet light is roughly defined as that portion (400- to 100-nm wavelengths) of the electromagnetic spectrum between longer wavelength visible light (400–700 nm) and shorter wavelength x-ray (10–100 nm) energy. Figure 1.1 shows the ultraviolet, visible, and infrared spectrums, indicating the various emission lines (1).


Figure 1.1 Laser Spectrum

1.2.1 Far or Vacuum UV


The shortest wavelength portion of the ultraviolet region of the electromagnetic spectrum is the “far UV” or “vacuum UV” (VUV), which is roughly the region from 100 to 200 nm. At these very shortest of the UV wavelengths, air becomes opaque, requiring that experiments be performed in a vacuum (or inert gas) so that the air does not absorb all the UV light. In commercial UV optical delivery systems, far or vacuum UV wavelengths must be contained in inert gas (argon, nitrogen) -purged beam containment tubes. If this is not provided, considerable energy losses will occur from air molecules absorbing the UV photons.

1.2.2 Deep-UV


The “deep-UV” portion of the ultraviolet spectrum is the region from approximately 180 to 280 nm, so-called because it is the deepest area of the ultraviolet where practical UV imaging is routinely done. It is also the deepest part of the UV spectrum where work can be done at atmosphere without side efforts.

1.2.3 Mid-UV


The “mid-UV” is the region of the ultraviolet spectrum from 280 to 315 nm, so-called because it is midway between deep-UV and near-UV.

1.2.4 Near-UV


The “near-UV” is the region from 315 to 400 nm, so-called because it is nearest to the visible portion of the electromagnetic spectrum.

1.3 Historical Development of the Laser


Before UV lasers, there were long wavelength, red lasers. In this section, we will discuss the origins of the UV laser back to the initial concepts of amplification of wave energy. The origins of the laser (Light Amplification by Stimulated Emission of Radiation) are traced back to the early 1900s when Albert Einstein, Niels Bohr, Max Plank, and Ernest Rutherford were developing theories about the nature and behavior of matter.

Rutherford formed the idea of the atom composed of a nucleus with orbiting electrons. The electron orbits occurred at various energy levels. Plank developed the idea of electromagnetic waves as the form taken by radiant energy, and further specified that each frequency had a fixed quantum or amount of energy.

Niels Bohr described the phenomenon of fluorescence or spontaneous emission. This occurs when an atomic electron drops from a high energy level to an unoccupied lower energy level. When this happens, a quantum of light is emitted spontaneously.

Einstein theorized that other forms of emission were possible and formulated the idea of stimulated emission. Einstein predicted that when energy was applied to atoms, the response would be emission of energy.

These scientific theories remained to be proven in the lab, and during World War II, another step was taken to identify what became known as “lasing action” or lasers. High frequency radiowave and microwave oscillators were developed that could generate electromagnetic waves of very high frequencies and short wavelengths. The RADAR (Radio Detection And Ranging) was a useful result of this work. The Microwave Amplification by the Stimulated Emission of Radiation (MASER) was also developed before the laser and proved the theory of population inversion.

An analogy of how light behaves in a laser can be taken from how sound behaves in an amplifier. If a loudspeaker is placed too close to a microphone, the sound from the speaker is reamplified through the microphone and produces a howl. The howl is caused by sound waves, placed at closely spaced intervals, reinforcing each other by being “in phase.” At a certain level, an oscillation begins which produces the howl (3). In the following section, we will explain how this same principle works with light to produce a laser beam.

1.4 How a Laser Works


Lasers are possible because of the way light interacts with atoms and mole cules. To describe how a laser works, we will first review some basic aspects of light/matter interaction. The electrons in an atom or molecule exist in very specific energy levels, called “states.” Each atom possesses electrons that are characteristic to the specific element, or combination of elements (molecules) represented.

1.4.1 Energy State Transitions


When an electron moves from one state to a lower energy level, or state, the atom gives up the excess energy as a “photon” of electromagnetic radiation (either light or x-rays). The amount of energy carried away equals the difference in the energy between the original higher state and the new lower state. In molecules, where these movements (transitions) between states involve motions of entire atoms rather than single electrons, the same phenomenon generally produces lower-energy photons (infrared light).

1.4.2 High and Low Energy Photons


The energy carried by a photon is determined by how rapidly the light waves in it oscillate, and this oscillation is measured either as the frequency (number of oscillations per second) or wavelength (distance that the waves move during one oscillation). Wavelength and frequency are related to each other by the speed at which the photons (waves) move—the speed of light. The energy of a photon (or, equivalently, the frequency or wavelength) determines its color. Blue light photons have more energy-a higher frequency and a shorter wavelength-than red light photons.

1.4.3 Spontaneous Emission


An electron in a particular state can also absorb a photon that has an energy equal to the difference between that state and a higher one. As a result, it can jump to the higher one (called an excited state), where it stays for a period of time before giving up energy by radiating a photon of the same or different energy, and returning to some lower state. This time is called its “lifetime for spontaneous emission.” Spontaneous lifetimes vary enormously, but are typically between a thousandth and a billionth of a second for levels of interest in common lasers. A spontaneously emitted photon can come out in any direction with equal...

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