GaP Heteroepitaxy on Si(100)

Benchmarking Surface Signals when Growing GaP on Si in CVD Ambients
Buch | Hardcover
XIV, 143 Seiten
2013 | 2013
Springer International Publishing (Verlag)
978-3-319-02879-8 (ISBN)

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GaP Heteroepitaxy on Si(100) - Henning Döscher
139,09 inkl. MwSt
This thesis offers a key contribution to improving optoelectronic devices and performance of photovoltaic materials. It reports almost lattice-matched growth of thin gallium phosphide films as a viable model system for III-V/Si(100) interface investigations.
Epitaxial integration of III-V semiconductors on silicon substrates has been desired over decades for high application potential in microelectronics, photovoltaics, and beyond. The performance of optoelectronic devices is still severely impaired by critical defect mechanisms driven by the crucial polar-on-nonpolar heterointerface. This thesis reports almost lattice-matched growth of thin gallium phosphide films as a viable model system for III-V/Si(100) interface investigations. The impact of antiphase disorder on the heteroepitaxial growth surface provides quantitative optical in situ access to one of the most notorious defect mechanisms, even in the vapor phase ambient common for compound semiconductor technology. Precise control over the surface structure of the Si(100) substrates prior to III-V nucleation prevents the formation of antiphase domains. The hydrogen-based process ambient enables the preparation of anomalous double-layer step structures on Si(100), highly beneficial for subsequent III-V integration.

Dr. Henning Döscher TU Ilmenau Institut für Physik, FG Photovoltaik Ehrenbergstr. 29 98693 Ilmenau

Introduction.- Experimental.- Si(100) surfaces in chemical vapor environments.- GaP(100) and InP(100) surfaces.- GaP growth on Si(100) and anti-phase disorder.- Conclusion.

Erscheint lt. Verlag 11.12.2013
Reihe/Serie Springer Theses
Zusatzinfo XIV, 143 p. 80 illus., 33 illus. in color.
Verlagsort Cham
Sprache englisch
Maße 155 x 235 mm
Gewicht 409 g
Themenwelt Naturwissenschaften Physik / Astronomie Atom- / Kern- / Molekularphysik
Naturwissenschaften Physik / Astronomie Optik
Technik Elektrotechnik / Energietechnik
Technik Maschinenbau
Schlagworte Anti-phase Disorder • III-V Semiconductor Heteroepitaxy on Silicon Subst • III-V Semiconductor Heteroepitaxy on Silicon Substrates • In Situ Reflectance Anisotropy Spectroscopy • Lattice-matched Growth • Materials for Photovoltaics • Metal-organic Vapor Phase Epitaxy • Polar on Non-polar Interface
ISBN-10 3-319-02879-0 / 3319028790
ISBN-13 978-3-319-02879-8 / 9783319028798
Zustand Neuware
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