Silicon-on-Insulator
Springer (Verlag)
978-94-010-8846-6 (ISBN)
1: Laser and Electron-Beam Recrystallization.- Growth Mechanisms and Defects in Si Layers Grown on SiO2 by Bridging (Lateral Seeded) Epitaxy.- Laser Crystallization of Polycrystalline Silicon by Controlling Lateral Thermal Profile.- Electron Beam Recrystallized SOI Structures.- Recrystallization of SOI Structures by Split Laser Beam.- Nucleation and Crystal Growth Characteristics in Energy Beam Crystallization of Silicon Islands.- Recrystallization of Silicon on Insulator with a Heat-Sink Structure.- Recrystallization of Polycrystalline Si over SiO2 through Strip Electron-Beam Irradiation.- 2: Zone Melting Recrystallization.- Zone-Melting Recrystallization of Si Films on SiO2.- Optically-Heated Zone Crystal Growth of Silicon Thin Films on Amorphous Substrates.- Recrystallization of Polycrystalline Silicon on Fused Silica Using an RF-Heated Carbon Susceptor.- Strip Heater Recrystallized SOI Structures.- Single Crystal Germanium Island Formation on Insulator by Zone Melting.- 3: Solid Phase Epitaxy.- Modeling of Interface Atomic Arrangement for Analysis of Solid Phase Epitaxy and Si-on-Insulator Structure.- Lateral Solid Phase Epitaxy of Evaporated Amorphous Si Films onto SiO2 Patterns.- Formation of a Silicon-on-Insulator Structure by Solid-Phase Epitaxy.- Characterization of Solid Phase Epitaxially Grown Si Films on SiO2.- 4: Characterization and Device Applications.- Microstructural Characterization of Silicon-on-Insulator Structures.- High Speed SOI-CMOS Devices by Laser Recrystallization Technique.- Characterization of SOI Double Si Active Layers through Fabrication of Elementary Devices.- Device Application of SIMOX (Separation by IMplanted OXygen) Structure.- Author Index.
Reihe/Serie | Advances in Solid State Technology ; 1 |
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Zusatzinfo | 304 p. |
Verlagsort | Dordrecht |
Sprache | englisch |
Maße | 155 x 235 mm |
Themenwelt | Naturwissenschaften ► Chemie ► Physikalische Chemie |
Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik | |
Naturwissenschaften ► Physik / Astronomie ► Thermodynamik | |
Technik ► Elektrotechnik / Energietechnik | |
Technik ► Maschinenbau | |
ISBN-10 | 94-010-8846-2 / 9401088462 |
ISBN-13 | 978-94-010-8846-6 / 9789401088466 |
Zustand | Neuware |
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