Compact Plasma and Focused Ion Beams

Sudeep Bhattacharjee

IntroductionPlasmaParticle InteractionsSome Basic Plasma PropertiesCriterion for the Definition of a PlasmaDifferent Types of PlasmasDescription of PlasmasTheoretical ApproachesMicrowave-Generated PlasmasCompact Microwave Plasma SourcesResearch Objective and MethodsReferencesReview of the Cutoff ProblemA Brief History of Earlier WorkMicrowave Propagation in WaveguidesPlasma Density CutoffReferencesPlasma and Wave DiagnosticsPlasma Diagnostics with Langmuir's ProbesDesign of Electromagnetic ProbesReferencesGenesis of a Wave Induced Discharge: A New PerspectiveIntroductionHistorical Development of Breakdown StudiesModeling of the Electron DynamicsDevelopment of the General AlgorithmField-Free Case: Three-Dimensional Random WalkElectron Transport in the Presence of an EM FieldMagnetostatically Assisted Electron Transport in the Presence of an EM FieldElectric Field Effects and the Random Walk ParameterLinear and Circularly Polarized WavesSummary and ConclusionReferencesPlasma Production in Continuous-Mode Microwaves: Near-Circular MulticuspIntroductionApparatusMulticusp DesignWaveguide DesignExperimental ResultsSpatial Profiles of the PlasmaDiscussionConclusionsReferencesPlasma Production in Continuous-Mode Microwaves: Rectangular Nonmulticusp WaveguideIntroductionExperimental ProceduresExperimental ResultsDiscussionConclusionsReferencesComparison of Square and Near-Circular Multicusp WaveguidesIntroductionWaveguide DesignExperimental ResultsDiscussionConclusionsSummary of Experimental Results in Continuous-Mode MicrowavesSummary of the Plasma Production MechanismsReferencesPlasma Production in Pulsed-Mode Microwaves: General ExperimentIn