Handbook of Ellipsometry (eBook)
886 Seiten
Elsevier Science (Verlag)
978-0-8155-1747-4 (ISBN)
With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
1 Polarized Light and Ellipsometry
Josef Humlíček
Institute of Condensed Matter Physics, Faculty of Science, Masaryk University Brno, Czech Republic
Polarization is a fundamental property of light. It has been treated comprehensively in many texts such as Born and Wolf[1], Brosseau[2], Chipman[3], and Saleh and Teich[4]. In this chapter, we summarize the basic theoretical knowledge on the properties of polarized light on two levels of complexity.
First, we collect in Section 1.1 information needed by “plug-and-play” users of commercial equipment, who are interested mostly in some of the applications of ellipsometry. As the precision and accuracy of state-of-the-art ellipsometers increase, detection of partially polarized light becomes increasingly important; we have included a short discussion of its basics in the quick-guide section.
Second, selected topics are treated in more detail in the following sections. The phenomenological background, ranging from Maxwell equations to plane electromagnetic waves, is covered in Section 1.2. It also provides the link of field amplitudes to measurable quantities (intensities of light waves), which is essential in any ellipsometric setup. The microscopic origin of optical response is discussed by Collins and Ferlauto in Chapter 2. The properties of general elliptic polarization are described using several representations in Section 1.3. Each of the representations is frequently encountered in ellipsometric literature; we discuss their use and provide mutual links for reference. In addition, we explain principal ways of measuring the parameters of polarized light in photometric ellipsometers. Photometric setups are dealt with in more detail by Tompkins, Jellison, and Roeseler elsewhere in this volume. Section 1.4 is devoted to a systematic description of the propagation of purely and partially polarized light through optical systems. We aim at selected optical components and try to explain the ways of predicting the polarization phenomena. A number of additional items is discussed by Jellison and Modine in Chapter 3 and chapter 6. The closing section of this chapter 1.5, deals with the simplest isotropic surfaces and homogeneous and isotropic film systems. We provide a detailed mathematical description and several illustrations of a typical behavior of polarized light at planar interfaces. The more complex case of anisotropic materials is treated by Schubert in Chapter 9.
1.1 A Quick Guide to Ellipsometry
1.1.1 Light Waves and Photons
Light is a transverse electromagnetic wave with frequencies ranging from about 3 × 1011 to 3 × 1016 Hz. The corresponding wavelengths in vacuum are from about 1 mm to 0.01 μm. In the range of optical frequencies, as well as below it (microwaves and radio waves), matter behaves as a continuum. Above the optical range, starting with soft X-rays, the discrete atomic structure of matter becomes important even for the phenomenology of radiation–matter interaction, since it leads to diffraction.
The light wave in a medium is linked to the induced motion of the electric charges of electrons and atomic nuclei, constituting macroscopic electric currents. On the other hand, it is mostly safe to neglect the induced magnetization, since the motion of magnetic moments of electrons and nuclei is too slow to follow the rapid optical oscillations. Thus, the most important quantity describing the light wave is the vector of its electric–field intensity, The existence of preferential directions of the action that the electric field in the wave exerts on electric charges in matter is the reason for the importance of its polarization. Early experiments with the optical behavior of calcite crystals led to the discovery of the polarization of light by Malus in 1808, well before the classical electromagnetic theory had been established. The spatial and temporal dependence of the electric field in a uniform, isotropic medium of the complex permittivity ε, is described by the wave equation[1,5]
(1.1)
where ω is the angular frequency of the light wave, and c is the light velocity in vacuum. A useful solution of the wave equation is the monochromatic plane wave propagating along the z–axis of an orthogonal coordinate system,
(1.2)
Here Ex and Ey are the complex amplitudes of along the x– and y–axes; they can be arranged conveniently in the 2 × 1 column vector. The symbols Re{f} and Im{f} mean real and imaginary parts of a complex quantity f, respectively; for example, the x component of the field intensity is We use the complex form of most of the equations, since they are simple and transparent. However, care should be taken in adopting a number of different possible conventions[6].
In order to satisfy the wave equation, Eq. (1.1), the nonvanishing component of the propagation vector of the plane wave of Eq. (1.2) assumes the values given by the dispersion equation
(1.3)
where is the complex refractive index of the medium. By choosing the plane–wave solution, Eq. (1.2), with the time dependence of exp(−iωt), we are adopting the standard physics convention, where the imaginary parts of ε and N are positive. Another convention, in which the two imaginary parts are negative (usually preferred in optics) is easily recognizable, since all expressions containing ε and N become complex conjugate.
The intensity of a light wave is its energy crossing a unit area perpendicular to the direction of propagation per unit time. It is given by the magnitude of the time average of the Poynting vector, where is the intensity of the magnetic field. In SI units, the intensity of the plane wave of Eq. (1.2) in free space is
(1.4)
where ε0 is the permittivity of vacuum. The signals measured by detectors in ellipsometric setups are proportional to the intensity, i.e., to the squared modulus of the complex amplitude of the electric intensity. Since a wave with the electric field amplitude of 1 V/m has the intensity of about 1.3 mW/m2. At low light intensities used in ellipsometric measurements, the response of materials to the light wave is linear.
The understanding of the light–matter interaction requires, as a rule, quantum mechanical description. A monochromatic wave of the angular frequency ω carries energy in the quanta of where is the Planck constant. To convert the wavelength λ to the photon energy in the practical units of electron–volts, we use the following relation,
(1.5)
The photon energy ranges from about 1 meV in the far–infrared to about 1 meV in the vacuum ultraviolet. For example, the green light of a mercury discharge lamp has the vacuum wavelength of 0.5461 μm, corresponding to the photon energy of 2.270 eV; a collimated light beam with the intensity of 1.3 mW/m2 (mentioned above as having the electric field intensity of 1 V/m in the classical picture) consists of the flux of 3.6 × 1015 photons per second per m2. A striking consequence of the quantized nature of the light wave is the onset of sensitivity of photoconductive or photovoltaic detectors. For example, silicon–based detectors provide signals only for photon energies above the bandgap (about 1.1 eV); a light beam of lower photon energy is not absorbed, irrespective of its intensity.
The second fingerprint of the quantum nature of a light wave (i.e., the flux of individual photons) is the superposition of possible polarization states of the photons, described by the quantum–mechanical probability amplitudes. This is formally identical with coherent superposition of the complex amplitudes of plane waves in the classical picture. The advantage of the quantum mechanical description becomes obvious especially in the treatment of unpolarized or partially polarized light.
1.1.2 Polarization of Light
The most general polarization of a monochromatic light wave, Eq. (1.2), is elliptic. Since the wave is transverse, the endpoint of the electric–field intensity vector precesses along an elliptic trajectory in any plane perpendicular to the direction of propagation. One revolution is achieved in the very short time interval of 2π/ω. The time evolution can be viewed as a superposition of harmonic vibrations along two perpendicular axes. If the two vibrations are shifted in phase, the resulting trajectory is elliptic. An example of the polarization ellipse is shown in Fig. 1.1. The wave is assumed to propagate along the z axis of the right–handed cartesian coordinate system x–y–z. The amplitudes of the electric field in the x and y directions are denoted by X and Y, respectively; both of them are real, non-negative quantities. The time dependence of the vector of Eq. (1.2) in the plane z = 0 can be written down conveniently using the following complex...
Erscheint lt. Verlag | 6.1.2005 |
---|---|
Sprache | englisch |
Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik |
Naturwissenschaften ► Physik / Astronomie ► Optik | |
Technik ► Elektrotechnik / Energietechnik | |
Technik ► Maschinenbau | |
ISBN-10 | 0-8155-1747-5 / 0815517475 |
ISBN-13 | 978-0-8155-1747-4 / 9780815517474 |
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