A User's Guide to Vacuum Technology (eBook)
536 Seiten
John Wiley & Sons (Verlag)
978-0-471-46715-1 (ISBN)
Edition of A User?s Guide to Vacuum Technology there have
been many important advances in the field, including spinning rotor
gauges, dry mechanical pumps, magnetically levitated turbo pumps,
and ultraclean system designs. These, along with improved cleaning
and assembly techniques have made contamination-free manufacturing
a reality. Designed to bridge the gap in both knowledge and
training between designers and end users of vacuum equipment, the
Third Edition offers a practical perspective on today?s vacuum
technology. With a focus on the operation, understanding, and
selection of equipment for industrial processes used in
semiconductor, optics, packaging, and related coating technologies,
A User?s Guide to Vacuum Technology, Third Edition provides
a detailed treatment of this important field. While emphasizing the
fundamentals and touching on significant topics not adequately
covered elsewhere, the text avoids topics not relevant to the
typical user.
JOHN F. O'HANLON, PHD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.
Its Basis
1. Vacuum Technology 3
2. Gas Properties 9
3. Gas Flow 25
4. Gas Release from Solids 57
Measurements
5. Pressure Gauges 81
6. Flow Meters 109
7. Pumping Speed 123
8. Residual Gas Analyzers 133
9. Interpretation of RGA Data 161
Production
10. Mechanical Pumps 183
11. Turbomolecular Pumps 201
12. Diffusion Pumps 217
13. Pump Fluids 229
14. Getter and Ion Pumps 247
15. Cryogenic Pumps 263
Materials
16. Materials in Vacuum 289
17. Joints, Seals, and Valves 313
18. Lubrication 345
Systems
19. Rough Vacuum Pumping 359
20. High Vacuum Systems 379
21. Ultraclean Vacuum Systems 403
22. High Flow Systems 415
23. Multichamber Systems 431
24. Leak Detection 447
Symbols 459
Appendixes
A. Units and Constants 463
B. Gas Properties 466
C. Material Properties 478
D. Isotopic Abundances 488
E. Cracking Patterns 492
F. Pump Fluid Properties 498
Index 505
"...an excellent handbook for engineers, scientists, or anybody who
uses vacuum systems on a regular basis." (IEEE Circuits &
Devices Magazine, May/June 2005)
"...clearly written with...many helpful hints...highly
recommended." (MRS Bulletin, January 2005)
"This book sucks in a good way...the third edition will
never get dusty on my bookshelf...although the text is
certainly not coffee-table reading material, it will have a wide
appeal...it is particularly valuable as a reference for those
who work practically with vacuum technologies and a must-buy for
those who design them." (JOM, February 26, 2004)
"...a fundamental understanding of modern vacuum technology and
a practical user's perspective of laboratory and industrial vacuum
technology. This edition, while still providing core information in
a very practical style...covers many new advances in the
field...there are loads of graphs, data, and tables to provide
practical and useful information to the vacuum user." (IEEE
Electrical Insulation Magazine)
| Erscheint lt. Verlag | 18.2.2005 |
|---|---|
| Sprache | englisch |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie |
| Technik ► Elektrotechnik / Energietechnik | |
| Technik ► Maschinenbau | |
| Schlagworte | Component Manufacturing • Electrical & Electronics Engineering • Elektrotechnik u. Elektronik • Komponentenfertigung • Vakuumtechnik |
| ISBN-10 | 0-471-46715-4 / 0471467154 |
| ISBN-13 | 978-0-471-46715-1 / 9780471467151 |
| Haben Sie eine Frage zum Produkt? |
PDF (Adobe DRM)Kopierschutz: Adobe-DRM
Adobe-DRM ist ein Kopierschutz, der das eBook vor Mißbrauch schützen soll. Dabei wird das eBook bereits beim Download auf Ihre persönliche Adobe-ID autorisiert. Lesen können Sie das eBook dann nur auf den Geräten, welche ebenfalls auf Ihre Adobe-ID registriert sind.
Details zum Adobe-DRM
Dateiformat: PDF (Portable Document Format)
Mit einem festen Seitenlayout eignet sich die PDF besonders für Fachbücher mit Spalten, Tabellen und Abbildungen. Eine PDF kann auf fast allen Geräten angezeigt werden, ist aber für kleine Displays (Smartphone, eReader) nur eingeschränkt geeignet.
Systemvoraussetzungen:
PC/Mac: Mit einem PC oder Mac können Sie dieses eBook lesen. Sie benötigen eine
eReader: Dieses eBook kann mit (fast) allen eBook-Readern gelesen werden. Mit dem amazon-Kindle ist es aber nicht kompatibel.
Smartphone/Tablet: Egal ob Apple oder Android, dieses eBook können Sie lesen. Sie benötigen eine
Geräteliste und zusätzliche Hinweise
Buying eBooks from abroad
For tax law reasons we can sell eBooks just within Germany and Switzerland. Regrettably we cannot fulfill eBook-orders from other countries.
aus dem Bereich
