Carbon Nanowalls (eBook)

Preface 6
Contents 8
Chapter 1: Introduction 12
1.1 Discovery of Two-Dimensional Carbon Nanostructures 12
1.2 Brief Description of Carbon Nanowalls 13
1.3 Research on Carbon Nanowalls 14
References 16
Chapter 2: Preparation Methods 19
2.1 Microwave Plasma Enhanced Chemical Vapor Deposition 20
2.2 Inductively Coupled Plasma Enhanced Chemical Vapor Deposition 23
2.3 Capacitively Coupled Plasma Enhanced Chemical Vapor Deposition with Radical Injection 26
2.3.1 RF Plasma-Enhanced CVD with H Radical Injection 27
2.3.2 VHF Plasma-Enhanced CVD with H Radical Injection 29
2.4 Electron-Beam-Excited Plasma Enhanced Chemical Vapor Deposition 30
2.5 Hot Filament Chemical Vapor Deposition 33
2.6 Atmospheric Pressure Plasma 35
2.7 Sputtering 36
References 38
Chapter 3: Physics of Carbon Nanowalls 41
3.1 Characterization of Carbon Nanowalls 41
3.1.1 SEM and TEM Observation 41
3.1.2 Raman Spectra of Carbon Nanowalls 44
3.1.3 Grazing Incidence In-Plane X-ray Diffraction 47
3.2 Electrical Properties of Carbon Nanowalls 49
3.2.1 Field Emission Properties of Carbon Nanowalls 49
3.2.2 Electrical Conduction of Carbon Nanowalls 50
3.2.3 Electrode for Electrochemistry 53
References 55
Chapter 4: Fabrication of Carbon Nanowalls Using Radical Injection Plasma Enhanced CVD 58
4.1 Concept of Radical-Controlled Processing 58
4.2 RF Plasma-Enhanced CVD with H Radical Injection 60
4.2.1 Experimental Setup for RF Plasma-Enhanced CVD with H Radical Injection 60
4.2.2 Measurement of Radical Densities in the Capacitively Coupled Plasma Region 61
4.2.3 Effect of Carbon Source Gases and H Radicals on Carbon Nanowall Growth 62
4.2.4 Fabrication of Straight and Aligned Carbon Nanowalls with Regular Spacing 67
4.3 VHF Plasma-Enhanced CVD with H Radical Injection 69
4.3.1 Experimental Setup of VHF Plasma-Enhanced CVD with H Radical Injection 69
4.3.2 Chamber Cleaning for Carbon Nanowall Growth with High Reproducibility 70
4.3.3 Electrical Conduction Control of Carbon Nanowalls 77
4.3.4 Fabrication of Monolithic Self-Sustaining Graphene Sheets 82
References 88
Chapter 5: Growth Mechanism of Carbon Nanowalls 90
5.1 Measurement of Radical Densities in the Plasma Used for the Fabrication of Carbon Nanowalls 90
5.1.1 Radicals in Microwave Plasma-Enhanced CVD with CH4/H2 Mixture 91
5.1.2 Radicals in Fluorocarbon Plasma with H Radical Injection 94
5.1.3 Discussion 98
5.2 Steady-State Growth of Carbon Nanowalls 100
5.2.1 RF Plasma-Enhanced CVD with H Radical Injection Employing C2F6/H2 System 100
5.2.2 Inductively Coupled Plasma Enhanced CVD Employing CH4/Ar System 101
5.2.3 Electron-Beam-Excited Plasma Enhanced CVD Employing CH4/H2 System 102
5.2.4 VHF Plasma-Enhanced CVD with H Radical Injection Employing C2F6/H2 System 104
5.2.5 Discussion 105
5.3 Nucleation of Carbon Nanowalls 106
5.3.1 Investigation of Nucleation Stage of Carbon Nanowall Growth Employing C2F6/H2 106
5.3.2 Comparison of Carbon Nanowall Growth Employing C2F6/H2 with and Without O2 Gas Addition 110
5.3.3 Nucleation Model of Carbon Nanowalls 114
5.4 Nucleation Mechanism of Carbon Nanowall Growth Under Ion Irradiation 116
5.4.1 Carbon Nanowall Formation Using Multi-Beam CVD Technique 116
5.4.2 Effect of Ions on the Growth of Carbon Nanowalls 119
5.5 Area-Selective Growth of Carbon Nanowalls 121
References 123
Chapter 6: Field Emission 126
6.1 Field Emission Properties of As-Grown Carbon Nanowalls 126
6.2 Surface Treatment for Improvement of Field Emission Properties 131
6.2.1 Surface Coating 132
6.2.2 Metal/Carbon Nanowall Composites 132
6.2.3 N2 Plasma Treatment 134
References 136
Chapter 7: Using Carbon Nanowalls as Templates 139
7.1 Fabrication of Nanostructured Materials Using Carbon Nanowalls as Templates 139
7.1.1 Decoration of Carbon Nanowalls 139
7.1.2 Fabrication of Nanostructured Materials on Carbon Nanowall Templates 140
7.2 Synthesis of Pt Nanoparticles on Carbon Nanowall Surface Using Supercritical Fluid Chemical Deposition 146
7.2.1 Introduction 146
7.2.2 Synthesis of Pt Nanoparticles by Plating 147
7.2.3 Synthesis of Pt Nanoparticles by Sputtering 148
7.2.4 Supercritical Fluids 149
7.2.5 Experimental Procedure of Metal-Organic Chemical Fluid Deposition Using Supercritical Carbon Dioxide 151
7.2.6 Characterization of Platinum Nanoparticles Formed by Metal-Organic Chemical Fluid Deposition Using Supercritical Carbon . 152
7.2.7 Mechanism of Platinum Nanoparticle Formation by Metal-Organic Chemical Fluid Deposition Using Supercritical Carbon Dioxi. 156
7.3 Pattern Transfer from Carbon Nanowall into SiO2 Film 159
References 163
Chapter 8: Future Perspective for Emerging Applications Using Carbon Nanowalls 166
References 168