Nanofabrication (eBook)

Preface 6
Contents 9
Introduction 13
1.1 Nanotechnology 13
1.2 Nanofabrication 14
1.3 Purpose of the Book 16
References 17
Nanofabrication by Photons 19
2.1 Introduction 19
2.2 Principle of Optical Projection Lithography 20
2.3 Optical Lithography at Shorter Wavelengths 25
2.4 Optical Lithography at High NA 34
2.5 Optical Lithography at Low k1 Factor 42
2.6 Near-Field Optical Lithography 69
2.7 Interferometric Optical Lithography 75
2.8 Maskless Optical Lithography 79
References 85
Nanofabrication by Charged Beams 89
3.1 Introduction 89
3.2 Focusing Charged Particle Beam 91
3.3 Scattering and Proximity Effect 101
3.4 Resist Materials and Processes 118
3.5 Ion Sputtering and Redeposition 129
3.6 Charged Particles Projection Lithography 132
References 136
Nanofabrication by Scanning Probes 140
4.1 Introduction 140
4.2 Principles of SPMs 141
4.3 Exposure of Resists 144
4.4 Local Oxidation Lithography 151
4.5 Additive Nanofabrication 154
4.6 Subtractive Nanofabrication 158
4.7 High-Throughput SPL 164
References 167
Nanofabrication by Replication 171
5.1 Introduction 171
5.2 Thermal Press Nanoimprint 172
5.3 Room Temperature Nanoimprint 183
5.4 UV-Cured Nanoimprint 186
5.5 Reverse Nanoimprint 202
5.6 Soft Lithography 206
References 216
Nanoscale Pattern Transfer 220
6.1 Introduction 220
6.2 Additive Pattern Transfer 221
6.3 Subtractive Pattern Transfer 243
References 271
Indirect Nanofabrication 276
7.1 Introduction 276
7.2 Sidewall Lithography 277
7.3 Dimensional Subtraction and Addition 281
7.4 Multistep Processing 294
7.5 Super Resolution Patterning 296
References 301
Nanofabrication by Self-Assembly 304
8.1 Introduction 304
8.2 Self-Assembly Processes 305
8.3 Guided Self-Assembly 313
8.4 Building Blocks of Future Nanosystems 321
References 338
Subject Index 343