Scanning Electron Microscopy
Physics of Image Formation and Microanalysis
Seiten
2010
|
2. Softcover reprint of the original 2nd ed. 1998
Springer Berlin (Verlag)
978-3-642-08372-3 (ISBN)
Springer Berlin (Verlag)
978-3-642-08372-3 (ISBN)
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.
"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."
T Mulvey, Measurement Science and Technology. 11, No12, December 2000
| Erscheint lt. Verlag | 1.12.2010 |
|---|---|
| Reihe/Serie | Springer Series in Optical Sciences |
| Mitarbeit |
Gast Herausgeber: P.W. Hawkes |
| Zusatzinfo | XIV, 529 p. |
| Verlagsort | Berlin |
| Sprache | englisch |
| Maße | 155 x 235 mm |
| Gewicht | 806 g |
| Themenwelt | Naturwissenschaften ► Chemie ► Analytische Chemie |
| Naturwissenschaften ► Chemie ► Physikalische Chemie | |
| Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik | |
| Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik | |
| Schlagworte | Crystal • diffraction • Electron Microscope • electron microscopy • Electron optics • Microscopy • Optics • Rasterelektronen Mikroskopie • scanning electron microscope • Scanning Tunneling Microscopy |
| ISBN-10 | 3-642-08372-2 / 3642083722 |
| ISBN-13 | 978-3-642-08372-3 / 9783642083723 |
| Zustand | Neuware |
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