Emerging Nanopatterning Methods

This book provides information about the state of the art in three areas of emerging nanopatterning methods, some of which have been part of the European Integrated Project, NaPa. Emerging Nanopatterning Methods focuses on nano imprint lithography, soft lithography, and self-assembly, as well as some methods that are still more in the early development phase and that could be classified as methods relying on microsystems (MEMS) as tools, such as cantilever-based methods to deposit small quantities of liquids, as well as depositing material through a microfabricated mask.