Optical Scattering
SPIE Press (Verlag)
978-0-8194-7776-7 (ISBN)
- Titel ist leider vergriffen;
keine Neuauflage - Artikel merken
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. This is a softcover version of PM24.
About the Second Edition / ix; Preface / xi; Acknowledgments / xiii; Chapter 1. Introduction to Light Scatter / 3; 1.1 The Scattering of Light / 4; 1.2 Scatter from a Smooth Sinusoidal Surface / 5; 1.3 Scatter from Other Surfaces / 12; 1.4 Scatter from Windows and Particulates / 15; 1.5 Bidirectional Scatter Distribution Functions / 19; 1.6 Total Integrated Scatter / 22; 1.7 Summary / 26; Chapter 2. Surface Roughness / 29; 2.1 Profile Characterization / 29; 2.2 The Surface Power Spectral Density and Autocovariance Functions / 44; 2.3 Summary / 57; Chapter 3. Scatter Calculations and Diffraction Theory / 59; 3.1 Overview / 59; 3.2 Kirchhoff Diffraction Theory / 66; 3.3 The Rayleigh Approach / 77; 3.4 Comparison of Vector and Scalar Results / 81; 3.5 Summary / 83; Chapter 4. Calculation of Smooth-Surface Statistics from the BRDF / 85; 4.1 Practical Application of the Rayleigh-Rice Perturbation Theory / 85; 4.2 Roughness Statistics of Isotropic Surfaces / 91; 4.3 Roughness Statistics of One-Dimensional Surfaces / 95; 4.4 Roughness Statistics for the General Case / 103; 4.5 The K-Correlation Surface Power Spectrum Models / 103; 4.6 The TIS Derivation from the Rayleigh-Rice Perturbation Theory / 107; 4.7 Summary / 109; Chapter 5. Polarization of Scattered Light / 111; 5.1 A Review of Polarization Concepts / 112; 5.2 The Polarization Factor Q / 121; 5.3 Scattering Vectors and Matrices / 126; 5.4 Summary / 132; Chapter 6. Scatter Measurements and Instrumentation / 133; 6.1 Scatterometer Components / 133; 6.2 Instrument Signature / 137; 6.3 Aperture Effects on the Measured BSDF / 139.
Erscheint lt. Verlag | 30.6.2009 |
---|---|
Reihe/Serie | Press Monographs |
Verlagsort | Bellingham |
Sprache | englisch |
Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Optik |
Technik | |
ISBN-10 | 0-8194-7776-1 / 0819477761 |
ISBN-13 | 978-0-8194-7776-7 / 9780819477767 |
Zustand | Neuware |
Haben Sie eine Frage zum Produkt? |
aus dem Bereich