Electromechanics and MEMS

Thomas B. Jones is Professor of Electrical Engineering at the University of Rochester. An experienced educator involved in teaching for over 40 years, his research has focused on electric field-mediated manipulation and transport of particles and liquids. He holds a PhD from the Massachusetts Institute of Technology, is the author of Electromechanics of Particles (Cambridge University Press, 1995) and is a Fellow of the IEEE. Nenad G. Nenadic is a Research Associate Professor at the Rochester Institute of Technology. His career, spanning both industry and academia, has involved him in many aspects of MEMS, including design and analysis, system-level simulation, test development and marketing. He holds a PhD from the University of Rochester, where he assisted in the teaching of graduate-level MEMS courses.

1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Capacitive sensing and resonant drive circuits; 6. Distributed 1-D and 2-D electromechanical structures; 7. Practical MEMS devices; 8. Electromechanics of piezoelectric elements; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Micromachining; D. A brief review of solid mechanics.