Optical Metrology

Optical metrology - the use of optical techniques for measurement - is a branch of optical and communications engineering under intensive development. This self-contained introduction to the field covers both fundamental theory and practical applications.

---

Optical metrology, or the use of optical techniques for measurement, has progressed rapidly in recent years. Modern sources of radiation, modulators, beam scanners, photo detectors and the computer-assisted detection and display of information have all contributed to the growing interest in the application of optical technology for the solution of a wide variety of measurement problems. This self-contained introduction to the field covers both fundamental theory and practical applications.