Micro System Technologies 90

Contents: Simulation and Design: Design of Micro Systems.- CAD of Optical Devices.- Simulation and Design - Electrical and Thermal Properties.- Simulation and Design of Sensors.- Measurement and Testing: Testing.- Material Characterization - Physical Properties; Semiconductor Characteristics; Optical Methods.- Materials: Materials for Packaging and Passivation.- Integrated Optics Materials and Technologies.- Technologies: Pattern Generation and Image Transfer.- Laser Supported Deposition.- Reactive Etching and Deposition.- Contact Methods.- Packaging.- Optical Assembly and Interconnection Technologies.- Sensor and Actuator Technologies.- Basic Components and Applications: Sensors for Physical Parameters.- Gas and Ionic Sensors.- Sensors for Biological and Medical Application.- Optical Sensors. Optical Components.- Actuators.- Author Index.