Silicon Anodization as a Structuring Technique
Springer Fachmedien Wiesbaden GmbH (Verlag)
978-3-658-19237-2 (ISBN)
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.
Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.
Erscheinungsdatum | 01.10.2017 |
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Zusatzinfo | XXIX, 316 p. 141 illus., 3 illus. in color. |
Verlagsort | Wiesbaden |
Sprache | englisch |
Maße | 148 x 210 mm |
Gewicht | 450 g |
Themenwelt | Mathematik / Informatik ► Mathematik ► Angewandte Mathematik |
Technik ► Elektrotechnik / Energietechnik | |
Technik ► Maschinenbau | |
Schlagworte | Appl.Mathematics/Computational Methods of Engineer • electrochemical etching • electropolishing • Engineering • Engineering: general • engineering thermodynamics • Engineering Thermodynamics, Heat and Mass Transfer • FEM Simulation • Maths for engineers • microstructuring • microsystems • Nanotechnology and Microengineering • other manufacturing technologies • sacrificial layer |
ISBN-10 | 3-658-19237-2 / 3658192372 |
ISBN-13 | 978-3-658-19237-2 / 9783658192372 |
Zustand | Neuware |
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