Piezoelectric Actuators and Ultrasonic Motors

1 The Trends in Micro-Mechatronics and Piezoelectric/Electrostrictive Actuators.- 1.1 Need for Micro-Displacement Transducers.- 1.2 Conventional Methods of Micro-Positioning.- 1.3 Review of Solid State Actuators.- 1.4 Future Directions for Ferroelectrics.- 2 Origins Of Electric Field Induced Strains.- 2.1 Ferroelectrics.- 2.2 Phenomenology of Piezoelectric/Electrostrictive Strains.- 2.3 Microscopic Origins of Piezoelectric/Electrostrictive Strains.- 2.4 Ferroelectric Domain Reorientations.- 3 Piezoelectric and Related Materials for Actuator Applications.- 3.1 Electrostriction in Oxide Perovskites.- 3.2 Practical Piezoelectric/Electrostrictive Materials.- 3.3 Temperature Characteristics of Electrostriction.- 3.4 Response Speed.- 3.5 Uniaxial Stress Dependence.- 3.6 Mechanical Strength.- 4 Structures and Fabrication Processes of Ceramic Actuators.- 4.1 Fabrication Processes of Ceramics.- 4.2 Fabrication Processes of Single Crystals and Thin Films.- 4.3 Piezoceramic: Polymer Composites.- 4.4 Designs of Ceramic Actuators.- 4.5 Ceramic Electrode Materials.- 4.6 Commercialized Piezoelectric Actuators.- 5 Measuring Techniques for Micro-Displacements and High Power Piezoelectric Characteristics.- 5.1 Electrical Methods.- 5.2 Optical Methods.- 5.3 X-ray Methods.- 5.4 Ultrasonic Methods.- 5.5 Piezoelectric Pressure Sensors.- 5.6 High Power Piezoelectric Characteristics.- 6 Drive/Control Techniques of Piezoelectric/Electrostrictive Actuators.- 6.1 Classification of Piezoelectric Actuators.- 6.2 Pulse Width Modulation Method.- 6.3 Polarization Control Method.- 6.4 Dynamic Control of Ceramic Actuators.- 6.5 Feedback Control.- 7 Servo Displacement Transducer Applications.- 7.1 High Precision Interferometric Dilatometer.- 7.2 Deformable Mirrors.- 7.3 Microscope Stages.- 7.4 PrecisionLinear Motion Guide Mechanism.- 7.5 Cutting Error Correction Mechanism.- 7.6 Oil-Pressure Servo Valves.- 7.7 VCR Head Tracking Actuators.- 7.8 Vibration Suppression Systems.- 8 Pulse Drive Motor Applications.- 8.1 Swing CCD Image Sensor.- 8.2 Inchworm Devices.- 8.3 Dot-Matrix Printer Heads.- 8.4 Ink Jet Printers.- 8.5 Piezoelectric Relays.- 9 Ultrasonic Motor Applications.- 9.1 Classification of Ultrasonic Motors.- 9.2 Standing Wave Type Motors.- 9.3 Propagating Wave Type Motors.- 9.4 Micro-Walking Machines.- 9.5 Speed/Thrust Calculation.- 9.6 Motor Designing Flow.- 9.7 Reliability of Ultrasonic Motors.- 9.8 Other Ultrasonic Devices.- 10 Present Status of Piezoelectric/Electrostrictive Actuators and Remaining Problems.- 10.1 Development Trends as Viewed from Patent Disclosure Statistics.- 10.2 Market of Piezoelectric Actuators/Ultrasonic Motors.- 10.3 Remaining Problems.- 10.4 Future of Ceramic Actuators.- Appendix 1 Standardization of Ceramic Actuators.- Appendix 2: Committee/Workshops on Ceramic Actuators.- Appendix 3: References to Commercialized Ceramic Actuators.