Zinc Oxide Bulk, Thin Films and Nanostructures (eBook)

Front Cover 1
Contents 6
Foreword 8
1 Basic Properties and Applications of ZnO 12
1.1 Introduction 12
1.2 Crystal structure and lattice parameters 13
1.3 Energy band gap 15
1.4 Mechanical properties 18
1.5 Lattice dynamics 22
1.6 Thermal properties 22
1.7 Electrical properties 25
1.8 Optical properties 25
1.9 Issues 27
1.10 Applications 28
Acknowledgments 28
References 29
2 Doping and Defects in ZnO 32
2.1 Introduction 32
2.2 Samples and apparatus 35
2.3 Hall-effect theory 36
2.4 Multi-layer analysis 38
2.5 Hydrogen and Group I impurities 39
2.6 Group II elements 43
2.7 Group III elements 43
2.8 Group IV elements 44
2.9 Group V elements 44
2.10 Group VI elements 47
2.11 Group VII elements 47
2.12 Donor-type point defects 47
2.13 Acceptor-type point defects 48
2.14 Summary 48
Acknowledgments 49
References 49
3 Synthesis and Characterization of Nitrogen-Doped ZnO Films Grown by MOCVD 54
3.1 Introduction 54
3.2 Background to nitrogen-doped ZnO 57
3.3 NREL research on the synthesizing and characterizing of nitrogen-doped ZnO films 65
3.4 Discussions and summary 89
References 91
4 Pulsed Laser Deposition of Zinc Oxide (ZnO) 96
4.1 Introduction 96
4.2 Pulsed laser deposition 98
4.3 Lasers and target materials used for ZnO growth 102
4.4 ZnO thin film processing by PLD 105
4.5 Doped and alloyed ZnO films 114
4.6 Multilayers, heterostructures and superlattices 144
4.7 Nanostructures by PLD 158
4.8 Other studies on PLD grown ZnO films 163
4.9 Conclusions 171
Acknowledgements 171
References 171
5 Optical Properties of ZnO and Related Alloys 186
5.1 Introduction 186
5.2 Optical transitions in ZnO 187
5.3 Refractive index of ZnO and MgZnO 219
5.4 Stimulated emission in ZnO 225
5.5 Recombination dynamics in ZnO 235
5.6 Band gap engineering: a brief review 239
5.7 Conclusions 244
Acknowledgments 244
References 244
6 Minority Carrier Transport in ZnO and Related Materials 252
6.1 Introduction 252
6.2 Role of minority carrier diffusion length in bipolar device performance 254
6.3 Methods for determination of minority carrier lifetime and diffusion length 255
6.4 Temperature dependence of minority carrier diffusion length and lifetime 259
6.5 Studies of minority carrier recombination 262
6.6 Summary 273
Acknowledgements 273
References 273
7 Contacts to ZnO 278
7.1 Ohmic contacts 278
7.2 Schottky contact to n-type ZnO 289
References 293
8 Ion Implantation into ZnO 296
8.1 Introduction 296
8.2 Ballistic displacements and dynamic annealing processes 297
8.3 Accumulation of structural disorder and lattice amorphization 299
8.4 Thermal annealing of implantation damage 309
8.5 Lattice sites of dopants 313
8.6 Electrical doping 313
8.7 Electrical isolation 314
8.8 Concluding remarks 320
Acknowledgments 320
References 320
9 Advances in Processing of ZnO 324
9.1 Introduction 324
9.2 Ion implantation 325
9.3 Etching of ZnO 325
9.4 Ohmic contacts 328
9.5 Schottky contacts 333
9.6 Properties of hydrogen in ZnO 337
9.7 Conclusions and summary 343
Acknowledgments 344
References 344
10 Novel Nanostructures and Nanodevices of ZnO 350
10.1 Introduction 350
10.2 Synthesis technique 351
10.3 Crystal structure of ZnO and its polar surfaces 352
10.4 Nanostructures and growth processes 353
10.5 Properties, potential applications and novel devices 369
10.6 Conclusion remark 377
Acknowledgement 380
References 380
11 ZnO/ZnMgO Heterojunction FETs 382
11.1 Introduction 383
11.2 MBE growth and characterization of ZnO films on a-plane sapphire substrates 385
11.3 Extension of the MBE growth technique from ZnO to Zn[sub(1-x)]Mg[sub(x)]O 392
11.4 Structural, optical and electrical properties of Zn[sub(1-x)Mg[sub(x)]O/ZnO heterostructures 399
11.5 Performance of a prototype Zn[sub(1-x)]Mg[sub(x)]O/ZnO HFET 414
11.6 Conclusion 419
Acknowledgements 421
References 421
12 ZnO Thin-Film Transistors 426
12.1 Introduction 426
12.2 Device structure and fabrication 427
12.3 Electrical characterization, performance, and modeling 433
12.4 Optical properties 449
12.5 Conclusion 450
References 451
13 ZnO Piezoelectric Devices 454
13.1 Introduction 454
13.2 Piezoelectric properties of ZnO 455
13.3 Material growth and compensation doping 456
13.4 ZnO-based surface acoustic wave devices 463
13.5 ZnO-based thin film bulk acoustic wave devices 484
13.6 Conclusion 495
Acknowledgements 495
References 496
14 Gas, Chemical and Biological Sensing with ZnO 502
14.1 Introduction 502
14.2 Gas and chemical sensing 504
14.3 Biological sensing 523
14.4 Conclusion 530
Acknowledgments 531
References 531
15 ZnO-Based Light Emitters 536
15.1 Introduction 537
15.2 ZnO homojunction LEDs 539
15.3 ZnO-based hybrid single-heterostructure LEDs 542
15.4 ZnO-based double-heterostructure LEDs 553
15.5 Conclusion 562
Acknowledgements 564
References 564
16 Ferromagnetism in ZnO Doped with Transition Metal Ions 566
16.1 Introduction 566
16.2 Mechanisms for ferromagnetism 568
16.3 Experimental results for ZnO DMS 572
16.4 Theory for ferromagnetism in DMS 577
16.5 Spin relaxation 579
16.6 Spintronic devices 581
16.7 Future work 583
References 584
Index 588
A 588
B 588
C 589
D 589
E 590
F 591
G 591
H 592
I 592
J 592
L 592
M 593
N 594
O 595
P 595
Q 597
R 597
S 597
T 598
U 599
V 599
W 600
X 600
Y 600
Z 600