Microstructuring of Glasses (eBook)

Preface 6
Acknowledgement 9
Contents 10
List of abbreviations 14
Part I Fundamentals of Inorganic Nonmetallic Glasses and Glass Processing 21
1 Silicate Glasses: A Class of Amorphous Materials 22
1.1 Structure of Glasses: Ionic Arrangement 22
1.2 Glass Properties of Importance for Microstructured Components 41
2 Thermodynamic Phenomena in Glass 76
2.1 Binding Enthalpy 76
2.2 Mechanisms of Materials Transport in Amorphous Homogeneous Solids 78
2.3 Enthalpy of Partial Crystallisation 84
2.4 Enthalpy of Melting and Evaporation 88
2.5 Redox Equilibria 89
3 Melting and Forming Glass Half Products for Microstructuring 92
3.1 Processes During Batch Melting 92
3.2 Special Problems that Have to be Observed During Fining, Homogenizing and Conditioning the Melt 95
3.3 Equipment for the Production of Glass Half Products 104
Part II Geometrical Microstructuring of Glasses and Applications 123
4 Introduction to Geometrical Microstructuring 124
4.1 Principles 124
4.2 Interrelations Between Material Properties and Geometrical Structures 126
4.3 Some Remarks about Lithography 129
5 Mechanical Structuring Processes 132
5.1 Introductory Remarks 132
5.2 Micromachining by Cutting 132
5.3 Ultrasonic Machining 144
5.4 Powder Blasting 148
5.5 Water Jet Processing 154
6 Chemical and Complex Structuring Processes 158
6.1 Chemical Etching 158
6.2 Other Thermal, Chemical and Electrical Structuring Processes 167
7 Thermal and Thermomechanical Structuring Processes 174
7.1 Sintering 174
7.2 Embossing and Press Forming 175
7.3 Drawing of Preformed Glass 181
7.4 Pull Extrusion 192
7.5 Printing Processes 192
8 Microstructuring Glasses Using Lasers 194
8.1 Introductory Remarks about Laser Processing 194
8.2 Microstructuring Glasses by Laser Processing 195
9 Geometrical Photostructuring 216
9.1 Basics 216
9.2 Technical Variations of the Photostructuring Process 237
9.3 Laser-Initiated Structuring of Photosensitive Glasses 274
10 Joining Methods for Glass Based Microdevices 282
10.1 Adhesive Bonding of Glass Parts 282
10.2 Joining Using Glass Solders 284
10.3 Diffusion Welding 285
10.4 Laser Beam Welding 286
10.5 Ultrasonic Welding 287
10.6 Thermal Bonding 289
10.7 Anodic Bonding 292
10.8 Microelectroforming 295
11 Properties and Selected Applications of Microstructured Glass Devices 298
11.1 Properties and Applications of Photostructured Glasses 298
11.2 More Microtechnological Glass Applications 309
References 314
Index 336