Micro and Nanomanufacturing (eBook)

Doctor Mark James Jackson is an Associate Professor of Mechanical Engineering Technology at Purdue University and was a Visiting Fellow at the University of Liverpool, U.K. Doctor Jackson is active in research work concerned with understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Doctor Jackson has directed, co-directed, and managed research grants funded by the Engineering and Physical Sciences Research Council, The Royal Society of London, The Royal Academy of Engineering, European Union, Ministry of Defence, Atomic Weapons Establishment, National Science Foundation, N.A.S.A. and U. S. Department of Energy. Doctor Jackson is Vice President and Chief Technology Officer of Vitrified Technologies, Inc., which is established to develop next generation nano and micro machine tools and cutting tools for nanotechnology applications. Dr. Jackson is strongly committed to working closely with manufacturing industry and has served on political committees to ensure that manufacturing counts.    

Contents 5
Preface 9
1. Principles of Micro- and Nanofabrication 11
1.1 Introduction 11
1.2 Material Removal Rates 57
1.3 Conclusions 61
1.4 Problems 61
References 62
2. Microfabrication Using X- ray Lithography 65
2.1 Introduction 65
2.2 X- ray Lithography 68
2.3 Synchrotron Radiation (SR) 69
2.4 Microfabrication Process 72
2.5 Methods of Resist Application 93
2.6. Exposure 95
2.7 Problems 105
References 106
3. Manufacturing High Aspect Ratio Microstructures 109
3.1 Introduction 109
3.2 Dry Etching 109
3.3 Plasma Etching Processes 110
3.4 Characteristics Of The Plasma 112
3.5 Etching of Microstructures 113
3.6 Micromachining High Aspect Ratio Microstructures 130
3.7 Micromolding 130
3.8 Micromolding Processes 131
3.9 Micromolding Tools 138
3.10 Micromold Design 141
3.11 Micromolding Applications 141
3.12 Limitations of Micromolding 142
3.13 Fabrication of Moving Microstructures 142
3.14 Conclusions 148
3.15 Problems 148
References 149
4. Meso-Micromachining 153
4.1 Introduction 153
4.2 Size Effects in Machining Processes 154
4.3 Mechanism for Large Plastic Flow 187
4.4 Inhomogeneous Microstrains 188
4.5 Origins of the Size Effect 190
4.6 Meso-Micromachining Processes 192
4.7 Problems 198
References 198
5. Mechanical Micromachining 201
5.1 Introduction 201
5.2 Microfluidic Systems 201
5.3 Theory of Micromachining 205
5.4 Experimental Micromachining 218
5.5 Micromachining Tool Design 231
5.6 High Speed Air Turbine Spindles 236
5.7 Mechanical Design of High-Speed Rotors 243
5.8 Discussion 260
5.9 Conclusions 261
5.10 Future Developments 262
5.11 Problems 263
References 263
6. Microgrinding 265
6.1 Introduction 265
6.2 Grinding Wheels 271
6.3 Conventional Grinding Processes 285
6.4 Precision Grinding Processes 289
6.5 Ultraprecision Grinding 309
6.6 Conclusions 324
6.7 Problems 325
References 325
7. Diamond Microcutting Tools 332
7.1 Introduction 332
7.2 Properties of Diamond 334
7.3 History of Diamond 335
7.4 CVD Diamond Technology 341
7.5 CVD Diamond Processes 342
7.6 Treatment of Substrate 346
7.7 Modification of HFCVD Process 352
7.8 Nucleation and Growth 354
7.9 Deposition on Three- Dimensional Substrates 365
7.10 Wear of Diamond 373
7.11 Time-Modulated CVD Diamond 381
7.12 Conclusions 390
7.13 Problems 391
References 391
8. Laser Micro- and Nanofabrication 396
8.1 Introduction 396
8.2 Laser Fundamentals 396
8.3 Laser Microfabrication 413
8.4 Laser Nanofabrication 473
8.5 Conclusions 481
8.6 Problems 482
References 482
9. Micromachining Using Pulsed Water Droplets 484
9.1 Introduction 484
9.2 Theory of Pulsed Liquid Impact 485
9.3 Impact by Water Drops 489
9.4 Modeling Machining Thresliolds 491
9.5 Comparative Results 502
9.6 Material Removal Rates 506
9.7 Design of Water-Based Machine Tools 508
9.8 Analysis of Space Frame 509
9.9 Mode Shapes of Tetrahedral Structures 513
9.10 Conclusions 525
9.11 Problems 527
References 527
10. Diamond Nanogrinding 529
10.1 Introduction 529
10.2 Piezoelectric Nanogrinding 530
10.3 Stress Analysis in a Nanogrinding Grain 532
10.4 Fracture Dominated Wear Model 542
10.5 Nanogrinding 543
10.6 Porous Nanogrinding Tools 553
10.7 Laser Dressing of Nanogrinding Tools 577
10.8 Future Directions 595
10.9 Problems 596
References 597
11. Nanomachining 599
11.1 Introduction 599
11.2 Nanometric Machining 600
11.3 Theoretical Basis of Nanomachining 603
11.4 Implementation of Nanomachining 620
11.5 Conclusions 638
11.6 Problems 639
References 640
12. Micro- and Nanomanufacturing 643
12.1 Introduction 643
12.2 Micromanufacturing 643
12.3 Nanomanufacturing 656
12.4 Commercialization Issues of Micro- and Nanotechnologies 680
12.5 Future Developments 691
12.6 Problems 692
References 692
Subject Index 694