Simulation and Design of Microsystems and Microstructures

In recent years rapid advances have been made in the technology for the manufacture of microsystems and microstructures. These advances and the development of micro-electro-mechanical systems has created a demand for accurate design and simulation systems which can be used to predict the behaviour of the fabrication and manufacturing processes. This text contains the proceedings of the first International Conference on Simulation and Design of Microsystems and Microstructures, held in Southampton during September 1995.