Large Scale Integrated Circuits Technology: State of the Art and Prospects
Kluwer Academic Publishers (Verlag)
978-90-247-2725-4 (ISBN)
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I. Overview.- Semiconductor Devices and the Role of Physics in Their Development.- LSI: Prospects and Problems.- II. Silicon Technology.- Silicon Crystals for Large Scale Integrated Circuits.- Structural Techniques for Bulk Defects Characterization.- III. Processing.- Planar Processing: Silicon Oxidation.- Planar Processing: Diffusion.- Ion Implantation.- Silicon Epitaxy.- Computer Simulation of Complete IC Fabrication Process.- Beam Processing Techniques Applied to Crystal Silicon Substrates.- Lithography Systems for VLSI.- IV. Bipolar Devices.- Bipolar Linear Integrated Circuits.- Bipolar Digital Circuits.- Advanced Bipolar Devices and Related Problems.- V. Mos Devices.- MOS Technologies and Devices for LSI.- Silicon on Insulator Integrated Circuits.- Advanced Silicon MOS Devices and Related Problems.- VI. Reliability.- Semiconductor Component Accelerated Testing and Data Analysis.- Basic Integrated Circuit Failure Mechanisms.- VII. Future Trends.- Miniaturization Limits for MOS Technology.- Physics of Submicron Devices.- The Role of GaAs in High Speed Integrated Circuits.- Josephson Integrated Circuits.
Reihe/Serie | NATO Science Series E ; 55 |
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Zusatzinfo | 784 p. |
Verlagsort | Dordrecht |
Sprache | englisch |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
ISBN-10 | 90-247-2725-1 / 9024727251 |
ISBN-13 | 978-90-247-2725-4 / 9789024727254 |
Zustand | Neuware |
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