Trace Analysis of Specialty and Electronic Gases (eBook)

Explores the latest advances and applications of specialty
and electronic gas analysis

The semiconductor industry depends upon a broad range of
instrumental techniques in order to detect and analyze impurities
that may be present in specialty and electronic gases, including
permanent gases, water vapor, reaction by-products, and metal
species. Trace Analysis of Specialty and Electronic Gases
draws together all the latest advances in analytical chemistry,
providing researchers with both the theory and the operating
principles of the full spectrum of instrumental techniques
available for specialty and electronic gas analysis. Moreover, the
book details the advantages and disadvantages of each technique,
steering readers away from common pitfalls.

Featuring contributions from leading analytical and industrial
chemists, Trace Analysis of Specialty and Electronic Gases
covers a wide range of practical industrial applications. The book
begins with the historical development of gas analysis and then
focuses on particular subjects or techniques such as:

* Metals sampling and ICP-MS analysis

* Improvements in FTIR spectroscopy

* Water vapor analysis techniques

* New infrared laser absorption spectroscopy approaches

* GC/MS, GC/AED, and GC-ICP-MS techniques

* Gas chromatography columns

* Atmospheric pressure ionization mass spectrometry

Lastly, the book examines gas mixtures and standards that are
critical for instrument calibration. There are also two appendices
offering information on fittings and material compatibility.

With its thorough review of the literature and step-by-step
guidance, Trace Analysis of Specialty and Electronic Gases
enables researchers to take full advantage of the latest advances
in gas analysis. Although the book's focus is the semiconductor and
electronics industry, analytical chemists in other industries
facing challenges with such issues as detection selectivity and
sensitivity, matrix gas interference, and materials compatibility
will also discover plenty of useful analytical approaches and
techniques.