Surface and Thin Film Analysis – A Compendium of Principles, Instrumentation, and Applications

Gernot Friedbacher is Associate Professor of Analytical Chemistry at the Vienna University of Technology. His research activities are focused on investigation of surfaces and surface processes with scanning probe microscopy and electron probe x-ray microanalysis covering a broad field of applications ranging from basic research on thin film systems to materials science. Over the last decades he has held numerous theoretical and practical courses in the field of analytical chemistry with emphasis on intstrumental analysis and surface- and interface analysis. Prof. Friedbacher has published over 120 research articles, reviews, and book chapters. Henning Bubert worked at the Institut fur Analytische Wissenschaften - ISAS - (Institute for Analytical Sciences) in Dortmund until his retirement in 2003. He is currently working as guest scientist. His research activities are mainly focused on investigation of surfaces and thin films by electron spectroscopy related to the development and application of new materials in mechanical engineering. He has published over 110 research articles, reviews, and book chapters.

INTRODUCTION ELECTRON DETECTION Photoelectron Spectroscopy (XPS, UPS) Auger Electron Spectroscopy (AES, SAM) Electron Energy Loss Spectroscopy (EELS) Low--energy Electron Diffraction (LEED) Other Electron Detecting Techniques (AEAPS, IAES, INS, MQS, IETS) ION DETECTION Static Secondary Ion Mass Spectrometry (SSIMS) Dynamic Secondary Ion Mass Spectrometry (SIMS) Electron Beam and HF--Plasma Secondary Neutral Mass Spectrometry (SNMS) Laser--SNMS Rutherford Backscattering Spectroscopy (RBS) Low Energy Ion Scattering (LEIS) Elastic Recoil Detection Analysis (ERDA) Nuclear Reaction Analysis (NRA) Other Ion Detecting Techniques (ESD, ESDIAD, TDS, GDMS, FABMS, APFIM, POSAP) PHOTON DETECTION Total Reflection X--Ray Fluorescence Analysis (TXRF) Energy--dispersive X--ray Spectroscopy (EDXS) Grazing Incidence X--Ray Methods for Near--surface Structural Studies Glow Discharge Optical Emission Spectroscopy (GD--OES) Surface Analysis by Laser Ablation Ion Beam Spectrochemical Analysis (IBSCA) Reflection Absorption IR Spectroscopy (RAIRS) Surface--enhanced Raman Scattering (SERS) UV/VIS/IR Ellipsometry (ELL) Other Photon Detecting Techniques (SXAPS, DAPS, IPES, BIS) SCANNING MICROSCOPY Atomic Force Microscopy (AFM) Scanning Tunneling Microscopy (STM) SUMMARY AND COMPARISON OF TECHNIQUES SURFACE ANALYTICAL EQUIPMENT SUPPLIERS REFERENCES