X-ray Scattering from thin films

High Resolution X-ray Scattering From Crystalline Thin Films
X, 190 Seiten
1998
Springer Berlin (Hersteller)
978-3-540-62029-7 (ISBN)

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This critical overview presents experimental methods for solving most frequent structural problems of mono-crystalline thin films and layered systems, including thickness, crystalline state, strain distribution, interface quality and other properties.
This critical overview presents experimental methods for solving most frequent structural problems of mono-crystalline thin films and layered systems, including thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is intended as a reference for experimentalists who want to improve their knowledge on modern X-ray methods for thin film analysis.

Part 1 Experimental realization: basic elements of an equipment; resolution elements; diffractometers and reflectometers. Part 2 The theory of X-ray diffraction and its realization by the experiment: kinematical X-ray scattering from ideal crystals; kinematical X-ray diffraction from deformed thin layers; kinematical X-ray diffraction from randomly disturbed layers; dynamical X-ray diffraction in perfect layers; dynamical X-ray diffraction in slightly deformed layers; optical reflection of X-rays from ideal layers; optical reflection of X-rays from layers with rough interfaces; dynamical X-ray diffraction in strongly asymmetric cases; grazing incidence diffraction (GID). Appendices: elements of the formal theory of scattering; structure factors, dispersion corrections and extinction length.

Zusatzinfo 100 figs.
Verlagsort Berlin
Sprache englisch
Einbandart gebunden
Themenwelt Naturwissenschaften Physik / Astronomie Festkörperphysik
Naturwissenschaften Physik / Astronomie Optik
ISBN-10 3-540-62029-X / 354062029X
ISBN-13 978-3-540-62029-7 / 9783540620297
Zustand Neuware
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