Micromachined Ultrasonic Transducers

The aim of this book is to teach the design and construction of micromachined ultrasonic transducers, an area rapidly increasing in popularity, and contrast and compare these transducers to each other and to traditional piezoelectric transducers. Micromachined ultrasonic transducers are gaining wide acceptance because of the use of silicon micromachining for their manufacture. This also enables capabilities of these transducers that outperform piezoelectric transducers and enable configurations that are practically impossible otherwise. This book teaches the principles of operations of micromachined ultrasonic transducers. The theory of their operation and the technology of their manufacturing will be discussed and compared to that of traditional piezoelectric transducers.