Silicon Wet Bulk Micromachining for MEMS

Prem Pal is associate professor in the Department of Physics, Indian Institute of Technology (IIT) Hyderabad, India. He obtained his MTech in solid state materials and PhD in MEMS from IIT Delhi, India, in 1999 and 2004, respectively. From July 2005 to June 2006, he was a postdoctoral researcher at Yonsei Microsystems Laboratory, School of Mechanical Engineering, Yonsei University, Seoul, South Korea. Then he worked in the Department of Micro-Nano Systems Engineering, Nagoya University, Japan, as Center of Excellence (COE) scientist from July 2006 to March 2008 and as JSPS fellow from March 2008 to March 2010. Dr. Pal has published more than 50 papers in peer-reviewed international journals and has made outstanding contributions to the area of silicon wet anisotropic etching, especially its application to the fabrication of MEMS components. His research interests include MEMS technology, MEMS-based sensors, silicon micromachining, and thin films for MEMS. Kazuo Sato is emeritus professor at Nagoya University, Japan, and professor at the Aichi Institute of Technology, Japan, since 2012. He is also the founding chair of the Micro/Nano Science and Technology Division of the Japan Society of Mechanical Engineers. He received his BS from Yokohama National University, Japan, in 1970 and PhD from the University of Tokyo, Japan, in 1982. He worked with Hitachi Ltd. from 1970 to 1994. He was a professor at the Micromachining and MEMS Laboratory, Nagoya University, from 1994 to 2012. Prof. Sato started his MEMS research in 1983 and has published 151 journal papers, 219 conference papers, and 20 books/book chapters on MEMS technologies. His research areas are micro-/nanophysics in anisotropic etching and mechanical properties of single-crystal silicon, as well as applied microsystems such as sensors and actuators.

A Brief Introduction of the Crystal Structure. Brief Overview of Silicon Wafer Manufacturing and Microfabrication Techniques. Isotropic Etching of Silicon and Related Materials. KOH-Based Anisotropic Etching TMAH-Based Anisotropic Etching. Convex and Concave Corners in Silicon Wet Bulk Micromachining. Alignment of Mask Patterns to Crystallographic Directions. Simple to Complex Structures Using Wet Bulk Micromachining.