Nanofabrication

Andrew Sarangan is a professor and associate director of the Electro-Optics Graduate Program at the University of Dayton, Dayton, Ohio. Dr. Sarangan’s current research interests include semiconductor optoelectronics, nanofabrication, and computational electromagnetics. He has developed graduate courses in nanofabrication,nanophotonics, optical thin films, and integrated optics. He is a senior member of the IEEE and the SPIE and a registered professional engineer in the state of Ohio. He is also an accomplished pilot and a certificated flight instructor.

Introduction to Micro and Nano-Fabrication. Vacuum and Plasma technology. Physical vapor deposition. Chemical vapor deposition. Optical thin film coatings. Substrate materials. Photoresists and photolithography. Wet chemical etching. Plasma etching. Semiconductor Doping & annealing. Semiconductor metrology. Packaging. MEMS and microfluidic device fabrication. Fabrication examples.