SEM Microcharacterization of Semiconductors

Buch | Hardcover

452 Seiten

1989
Academic Press Inc (Verlag)
978-0-12-353855-0 (ISBN)

Titel ist leider vergriffen;
keine Neuauflage

Artikel merken

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.

Erscheint lt. Verlag	16.11.1989
Reihe/Serie	Techniques of Physics
Verlagsort	San Diego
Sprache	englisch
Maße	152 x 229 mm
Gewicht	820 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
ISBN-10	0-12-353855-6 / 0123538556
ISBN-13	978-0-12-353855-0 / 9780123538550
Zustand	Neuware