Semiconductor Technology

About the editors Mikhail E. Levinshtein is a professor at the Ioffe Institute of the Russian Academy of Science. Michael S. Shur teaches in the Electrical, Computer and Systems Engineering Department of Rensselaer Polytechnic Institute.

Introduction to Semiconductor Technology (E. Guk & N. Shmidt).; Transmutation Doping of Semiconductors by Charged Particles (V. Kozlovskii & L. Zakharenkov).; Polymer Diffusants in Semiconductor Technology (E. Guk, et al.).; Rare--Earth Elements in the Technology of III--V Compounds (L. Zakharenkov, et al.).; Intrinsic Point Defect Engineering in Silicon High--Voltage Power Device Technology (N. Sobolev).; Isovalent Impurity Doping of Direct--Gap III--V Semiconductor Layers (V. Chaldyshev & S. Novikov).; Surface Passivation of III--V Compounds by Inorganic Dielectrics and Polyimides (A. Gorelenok, et al.).; Precision Profiling of Semiconductor Surfaces by Photochemical Etching (D. Goryachev, et al.).; Index.