Micro, Nanosystems and Systems on Chips

Alina Voda is Associate Professor of Control Systems at Grenoble University in France. She is a well known expert in control applications of different dynamical systems and their application in industry.

Introduction xi

PART I. MINI AND MICROSYSTEMS 1

Chapter 1. Modeling and Control of Stick-slip Micropositioning Devices 3
Micky RAKOTONDRABE, Yassine HADDAB, Philippe LUTZ

1.1. Introduction 3

1.2. General description of stick-slip micropositioning devices 4

1.3. Model of the sub-step mode 6

1.4. PI control of the sub-step mode 13

1.5. Modeling the coarsemode 15

1.6. Voltage/frequency (U/f) proportional control of the coarse mode 18

1.7. Conclusion 26

1.8. Bibliography 28

Chapter 2. Microbeam Dynamic Shaping by Closed-loop Electrostatic Actuation using Modal Control 31
Chady KHARRAT, Eric COLINET, Alina VODA

2.1. Introduction 31

2.2. System description 34

2.3. Modal analysis 36

2.4. Mode-based control 40

2.5. Conclusion 50

2.6. Bibliography 53

PART II. NANOSYSTEMS AND NANOWORLD 57

Chapter 3. Observer-based Estimation of Weak Forces in a Nanosystem Measurement Device 59
Gildas BESANÇON, Alina VODA, Guillaume JOURDAN

3.1. Introduction 59

3.2. Observer approach in an AFM measurement set-up 61

3.3. Extension to back action evasion 71

3.4. Conclusion 79

3.5. Acknowledgements 81

3.6. Bibliography 81

Chapter 4. Tunnel Current for a Robust, High-bandwidth and Ultraprecise Nanopositioning 85
Sylvain BLANVILLAIN, Alina VODA, Gildas BESANÇON

4.1. Introduction 85

4.2. System description 87

4.3. System modeling 89

4.4. Problem statement 97

4.5. Tools to deal with noise 100

4.6. Closed-loop requirements 102

4.7. Control strategy 105

4.8. Results 111

4.9. Conclusion 115

4.10. Bibliography 116

Chapter 5. Controller Design and Analysis for High-performance STM 121
Irfan AHMAD, Alina VODA, Gildas BESANÇON

5.1. Introduction 121

5.2. General description of STM 123

5.3. Control design model 127

5.4. H∞ controller design 131

5.5. Analysis with system parametric uncertainties 139

5.6. Simulation results 142

5.7. Conclusions 143

5.8. Bibliography 146

Chapter 6. Modeling, Identification and Control of a Micro-cantilever Array 149
Scott COGAN, Hui HUI, Michel LENCZNER, Emmanuel PILLET, Nicolas RATTIER, Youssef YAKOUBI

6.1. Introduction 150

6.2. Modeling and identification of a cantilever array 151

6.3. Semi-decentralized approximation of optimal control applied to a cantilever array 164

6.4. Simulation of large-scale periodic circuits by a homogenization method 175

6.5. Bibliography 191

6.6. Appendix 193

Chapter 7. Fractional Order Modeling and Identification for Electrochemical Nano-biochip 197
Abdelbaki DJOUAMBI, Alina VODA, Pierre GRANGEAT, Pascal MAILLEY

7.1. Introduction 197

7.2. Mathematical background 199

7.3. Prediction error algorithm for fractional order system identification 202

7.4. Fractional order modeling of electrochemical processes 206

7.5. Identification of a real electrochemical biochip 209

7.6. Conclusion 215

7.7. Bibliography 217

PART III. FROM NANOWORLD TO MACRO AND HUMAN INTERFACES 221

Chapter 8. Human-in-the-loop Telemicromanipulation System Assisted by Multisensory Feedback 223
Mehdi AMMI, Antoine FERREIRA

8.1. Introduction 224

8.2. Haptic-based multimodal telemicromanipulation system    225

8.3. 3D visual perception using virtual reality 228

8.4. Haptic rendering for intuitive and efficient interaction with the microenvironment 237

8.5. Evaluating manipulation tasks through multimodal feedback and assistance metaphors 246

8.6. Conclusion 253

8.7.Bibliography 254

Chapter 9. Six-dof Teleoperation Platform: Application to Flexible Molecular Docking 257
Bruno DAUNAY, Stéphane RÉGNIER

9.1. Introduction 258

9.2. Proposed approach 261

9.3. Force-position control scheme 266

9.4. Control scheme for high dynamical and delayed systems 277

9.5. From energy description of a force field to force feeling 287

9.6. Conclusion 295

9.7. Bibliography 297

List of Authors 301

Index 305