Fundamental Principles of Engineering Nanometrology

Presents the principles of engineering metrology applied to the micro- and nanoscale suitable for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. This work also covers basic metrological terminology, and the important topic of measurement uncertainty.

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.