Advances in Atomic, Molecular, and Optical Physics (eBook)

Cover 1
Contents 6
Contributors 8
Preface 10
Chapter 1. Mechanisms of Electron Transport in Electrical Discharges and Electron Collision Cross Sections 14
I. Introduction 15
II. Major Characteristics of Collisions and Reactions in Discharges and Plasmas 16
III. Cross Sections and Reaction Rate Constants of Atomic and Molecular Processes 19
IV. Measurements of Electron Collision Cross Sections and Illustrative Results 21
V. Measurements of Partial Cross Sections with the Use of the Appearance Potential in Mass Spectrometry 36
VI. Measurements of Cross Sections for the Production of Positive and Negative Ions 38
VII. Outlook 42
VIII. Acknowledgments 43
IX. References 44
Chapter 2. Theoretical Consideration of Plasma-Processing Processes 46
I. Introduction 46
II. An Example of Electron-Molecule Scattering 47
III. Overview of Theoretical Framework 50
IV. Current Level of the Accuracy of Theoretical Approaches 62
V. Excited Species 66
VI. Perspective and Conclusion 68
VII. Acknowledgment 69
VIII. References 69
Chapter 3. Electron Collision Data for Plasma-Processing Gases 72
I. Introduction 72
II. Plasma-Processing Gases 73
III. Data Assessment 78
IV. Assessed Cross Sections and Coefficients 96
V. Boltzmann-Code-Generated Collision Cross-Section Sets 106
VI. Conclusions 108
VII. References 109
Chapter 4. Radical Measurements in Plasma Processing 112
I. Introduction 112
II. Summary of Recent Developments in Measurement Methods for Radicals in Plasma Processing 113
III. Details of in Situ Measurement Methods for Radicals in Processing Plasmas 115
IV. Representative Results of CFx and SiHx Radicals in Processing Plasmas 121
V. Conclusions 136
VI. References 137
Chapter 5. Radio-Frequency Plasma Modeling for Low-Temperature Processing 140
I. Introduction 140
II. Radio-Frequency Electron Transport Theory 141
III. Modeling of Radio-Frequency Plasmas 154
IV. Conclusions 166
V. Acknowledgments 166
VI. References 166
Chapter 6. Electron Interactions with Excited Atoms and Molecules 168
I. Introduction 169
II. Electron Scattering from Excited Atoms 172
III. Electron-Impact Ionization of Excited Atoms 213
IV. Electron Scattering from Excited Molecules 226
V. Electron-Impact Ionization of Excited Molecules 236
VI. Electron Attachment to Excited Molecules 239
VII. Concluding Remarks 295
VIII. Acknowledgment 296
IX. Appendix A 296
X. References 298
Subject Index 308
Contents of Volumes in this Series 318