The Physical Properties of Thin Metal Films -

The Physical Properties of Thin Metal Films

Buch | Hardcover
230 Seiten
2003
CRC Press (Verlag)
978-0-415-28390-8 (ISBN)
118,45 inkl. MwSt
Thin films of conducting materials, such as metals, alloys and semiconductors are currently in use in many areas of technology, particularly in modern integrated circuit microelectronics. This volume presents the complex physical properties particular to thin conducting films, including the necessary theory, confirming experiments and applications.
Thin films of conducting materials, such as metals, alloys and semiconductors are currently in use in many areas of science and technology, particularly in modern integrated circuit microelectronics that require high quality thin films for the manufacture of connection layers, resistors and ohmic contacts. These conducting films are also important for fundamental investigations in physics, radio-physics and physical chemistry. Physical Properties of Thin Metal Films provides a clear presentation of the complex physical properties particular to thin conducting films and includes the necessary theory, confirming experiments and applications. The volume will be an invaluable reference for graduates, engineers and scientists working in the electronics industry and fields of pure and applied science.

G. P. Zhigal'skii, B. K. Jones

Conduction in Discontinuous Films. Size-effects in Thin Metal Films. Internal Mechanical Stresses and Voids in Thin Metal Films. Electrical Noise in Thin Films and Thin-Film Structures. Non-linear Conduction and Non-Equilibrium Noise in Thin Films. Degradation Mechanisms in Thin Metal Films.

Erscheint lt. Verlag 10.7.2003
Verlagsort London
Sprache englisch
Maße 156 x 234 mm
Gewicht 476 g
Themenwelt Naturwissenschaften Physik / Astronomie Thermodynamik
Technik
ISBN-10 0-415-28390-6 / 0415283906
ISBN-13 978-0-415-28390-8 / 9780415283908
Zustand Neuware
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